Experiments in micromanipulation and CAD-driven microassembly

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3202, Issue , 1998, Pages 98-106

  Feddema, John T ^a   Keller, Chris G ^b   Howe, Roger T ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

LIGA; MEMS; Microassembly; Micromanipulation; Microtweezers; Visual Servoing

Indexed keywords

CAD DRAWINGS; DESIRED POSITIONS; HIGH ASPECT RATIOS; LIGA; LONG DISTANCES; MICROASSEMBLY; MICROMANIPULATION; MICROSCOPE IMAGES; MICROTWEEZERS; OUTSIDE DIMENSIONS; PICKING UP; PRECISION STAGES; REFERENCE IMAGES; SUB MICRONS; SYNTHETIC IMAGES; TEST IMAGES; WORKCELL;

ASPECT RATIO; FOURIER TRANSFORMS; IMAGE PROCESSING; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; MICROSYSTEMS; OPTICAL DATA PROCESSING; PHOTOCOPYING; PHOTORESISTS; POLYSILICON;

VISUAL SERVOING;

EID: 0346121268     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.298027     Document Type: Conference Paper

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