Investigation of the LIGA process to fabricate microchannel plates

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 645-648

  Liu, Robin H ^a   Vasile, Michael J ^a   Goettert, Jost ^a   Beebe, David J ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROPLATING; GLASS; MOLDS; NICKEL; PLASTICS; SOL-GELS; X RAY LITHOGRAPHY;

MICROCHANNEL PLATES; SPIN ON GLASS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030718289     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)