Terahertz waveguide components fabricated using a 3D x-ray microfabrication technique

Electronics Letters

Volumn 32, Issue 19, 1996, Pages 1794-1795

  Moon, S W ^a,b   Mann, C M ^a   Maddison, B J ^a   Turcu, I C E ^a   Allot, R ^a   Huq, S E ^a   Lisi, N ^a  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Optical waveguides; Waveguides; X ray lithography

Indexed keywords

ELECTROPLATING; ETCHING; FABRICATION; GOLD; LASER PRODUCED PLASMAS; MASKS; MICROMACHINING; PLASMA SOURCES; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES; THREE DIMENSIONAL; X RAY LITHOGRAPHY;

CHEMICAL ETCHING; LASER PLASMA SOURCE; SPUTTER COATING; SYNCHROTRON SOURCE; WAVEGUIDE THEORY; X RAY MASKS;

OPTICAL WAVEGUIDES;

EID: 3242851564     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19961166     Document Type: Article

References (5)

1. ELLISON, B.N., OLDFLELD, M.L., MATHESON, D.N., MADDISON, B.J., MANN, C.M., MARAZITA, S., CROWE, T.W., MAASKANT, P., and KELLY, W.M.: 'First results for a 2.5THz Schottky diode waveguide mixer'. 7th Int. Symp. Space Terahertz Technol., University of Virginia, March 1996
2. TURCU, I.C.E.: 'Picosecond excimer laser-plasma X-ray source for microscopy, biochemistry and lithography', Appl. Laser Plasma Radiation, SPIE,2015, pp. 243-260
3. ELLISON, B.N., OLDFIELD, M.L., MATHESON, D.N., MADDISON, B.I., MANN, C.M., and SMITH, A.F.: 'Corrugated feedhorns at terahertz frequencies - preliminary results'. Fifth Int. Symp. Space Terahertz Technol., Ann Arbor, May 1994
4. TURCU, I.C.E., REEVES, C.M., STEVENSON, J.T.M., ROSS, A.W.S., GUNDLACH, A.M., PREWITT, P., ANASTASI, P., KOEK, B., MITCHELL, P., and LAKE, P.: Proc.MNE 94, Microelectronic Eng., 1995, 27, pp. 187-190
5. REEVES, C.M.: 'Fabrication of a 200nm field effect transistor by X-ray lithography with a laser plasma X-ray source', Electron. Lett., 1995, 31, (25), pp. 2218-2219