Development of LIGA-fabricated, self-priming, in-line gear pumps

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 757-760

  Dewa, Andrew S ^a   Deng, Keren ^a   Ritter, Darren C ^a   Bonham, Charles ^a   Guckel, Henry ^a   Massood Ansari, Sombol ^a  

^a MEMStek Products   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CHARACTERIZATION; GEARS; MAGNETIC DEVICES; MICROELECTROMECHANICAL DEVICES; PERFORMANCE;

IN LINE GEAR PUMPS; MAGNETIC ACTUATION; MICROPUMPS;

PUMPS;

EID: 0030704811     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)