Three-dimensional LIGA structures for use in tagging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3673, Issue , 1999, Pages 122-126

  Cox, Adam ^a   Garcia, Ephrahim ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT SENSORS; ELECTRODEPOSITION; INTELLIGENT MATERIALS; MICROMACHINING; MICROSENSORS; NICKEL; THREE DIMENSIONAL; TRACKING (POSITION);

LIGA STRUCTURES; MICROELECTROMECHANICAL SYSTEMS; THREE DIMENSIONAL MICROSCALE BURRS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033316736     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)