LIGA-Technology for the fabrication of positioned planar structures

Microsystem Technologies

Volumn 4, Issue 3, 1998, Pages 132-134

  Schift, H ^a   Sochtig J ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001395428     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050115     Document Type: Article

References (6)

1. Bauer H-D; Ehrfeld W; Gerner M; Paatzsch T; Picard A; Schift H; Weber L: (1995): Micro-optical elements and optical interconnection components fabricated using the LIGA technique. Proc. Int. Symp. on Microsystems, Intelligent Materials and Robots, Sendai, Japan, Sept. 1995, pp. 33-36
2. Müller A; Gottert J; Mohr J; Rogner A: Fabrication of stepped micro-optical benches for fibre and free space applications (1996): High aspect ratio microstructure technology (HARMST '95), Karlsruhe, July 1995, Microsystem Technologies, 2 pp. 40-45
3. Gale MT; Rossi M; Pedersen J; Schütz H: (1994): Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists. Optical Engineering, 33, pp. 3556-3566
4. Herzig H-P; (ed.): Micro-Optics (1997): Elements, systems and applications, chapter 4, London: Taylor & Francis
5. Rossi M; Bona GL; Kunz RE: (1995): Arrays of anamorphic phase-matched Fresnel elements for diode-to-fiber coupling. Applied Optics, 34, pp. 2483-2488
6. Thurigen C; Ehrfeld W; Hagemann B; Kämper K-P; Lehr H; Michel F: (1996): Gesichtspunkte beim Miniaturisieren von Umlaufrädergetrieben, Proc. Symp. Innovative Kleinantriebe, Mainz, May 1996, VDI-Bericht 1269