High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM

Microsystem Technologies

Volumn 6, Issue 5, 2000, Pages 175-178

  Takahata, K ^a   Shibaike, N ^b   Guckel, H ^c  

^a PANASONIC CORPORATION   (Japan)

^b Matsushita Research Institute Tokyo Inc   (Japan)

^c University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000788346     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420000052     Document Type: Article

References (5)

1. Guckel H; Skrobis KJ; Christenson TR; Klein J (1994) Micromechanics for Actuators Via Deep X-ray Lithography Proc. SPIE's 1994 Symposium on Microlithography 39-47
2. Masaki T; Kawata K; Masuzawa T (1990) Micro Electro-Discharge Machining and Its Applications. Proc. IEEE MEMS 21-26
3. Takahata K; Aoki S; Sato T (1997) Fine Surface Finishing Method for 3-Dimensional Micro Structures. IEICE Transactions on Electronics E80-C, (2): 291-296
4. Masuzawa T (1985) Wire Electrodischarge Grinding for Micro Machining. Annals of the CIRP 34: 431-434
5. Guckel H; Christenson TR; Skrobis KJ; Denton DD; Choi B; Lovell EG; Lee JW; Bajikar SS; Chapman TW (1990) Deep X-Ray and UV Lithographies for Micromechanics. Technical Digest IEEE Solid-State Sensor and Actuator Workshop 118-122