Microsystem technology: Between research and industrial application

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 47-52

  Abraham, M ^a   Ehrfeld, W ^a   Hessel, V ^a   Kamper K P ^a   Lacher, M ^a   Picard, A ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATIONS; FABRICATION; INDUSTRY; TECHNOLOGY;

MICROSYSTEM TECHNOLOGY;

MICROELECTRONICS;

EID: 0031706877     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00011-2     Document Type: Article

References (7)

1. K.-P. Kämper, W. Ehrfeld, B. Hagemann, H. Lehr, F. Michel, A. Schirling, Ch. Thürigen, T. Wittig, Proc. Actuator 96, Bremen, 1996
2. A. Picard, W, Ehrfeld, J. Reinhardt, D. Morlion, J. Vanderwege, J. P. Vetter, Proc. European Conf. Electronics Packaging Technology & Int. Conf. Interconnnection Technology in Electronics, Essen, (1996) 77
3. W. Ehrfeld, V. Hessel, H. Möbius, Th. Richter, K. Russow in: Microsystem Technology for Chemical and Biological Microreactors (W. Ehrfeld, Ed.), DECHEMA Monograph, 132, VCH, Weinheim, 1996
4. H. Rohrer, Microelectronics Engineering 32 (1996) 5
5. W. Noell, M. Abraham, K. Mayr, A. Ruf, J. Barenz, O. Hollricher, O. Marti, P. Güthner, Appl. Phys. Lett. 70. 1236 (1997)
6. H.J. Mamin, B.D. Terris, L. S. Fan, S. Hoen, R. C. Barett, D. Rugar, IBM J. Res. Develop. Vol. 39, , 681 (1995)
7. K. Petersen, "MEMS: What lies ahead?", Proceedings Transducers '95, Eurosensors '96, June 25-29, Stockholm, Sweden, p. 894.