Optical 2 x 2 switch matrix with electromechanical micromotors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 67-76

  Ruzzu, Antonio ^a   Haller, Dirk ^a   Mohr, Juergen ^a   Wallrabe, Ulrike ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Electrostatic motor; Liga; Micromirror; Microoptical bench; Optical switch array; Wobblemotor

Indexed keywords

INSERTION LOSSES; MIRRORS; OPTICAL SWITCHES;

ALIGNMENT FEATURES; ANGULAR DISPLACEMENT; CERAMIC SUBSTRATES; ELECTROSTATIC WOBBLE MOTORS; MICRO-OPTICAL BENCH; OPTICAL TELECOMMUNICATION; PROTOTYPE FEATURES; TELECOMMUNICATION WAVELENGTHS;

MICROMOTORS;

EID: 0012528182     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396516     Document Type: Conference Paper

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