Microgrippers fabricated by the LIGA technique

Sensors and Actuators, A: Physical

Volumn 58, Issue 3, 1997, Pages 265-272

  Ballandras, S ^a   Basrour, S ^a   Robert, L ^a   Megtert, S ^b   Blind, P ^c   Rouillay, M ^a   Bernede P ^a   Daniau, W ^a  

^a FEMTO ST INSTITUTE   (France)

^b UNIVERSITÉ PARIS SACLAY   (France)

^c CETEHOR   (France)

Author keywords

Characterization; Finite element analysis; LIGA; Mechanical properties; Microgrippers

Indexed keywords

ACTUATORS; DESIGN; FABRICATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MINIATURE INSTRUMENTS; NUMERICAL ANALYSIS;

MICROGRIPPERS;

GRIPPERS;

EID: 0031081865     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01396-4     Document Type: Article

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