A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technology

Microsystem Technologies

Volumn 7, Issue 3, 2001, Pages 103-106

  Yi, F ^a   Peng, L ^a   Zhang, J ^a   Han, Y ^a  

^a INSTITUTE OF HIGH ENERGY PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041401196     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420100090     Document Type: Article

References (12)

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11. Tang E; Yan Y et al (1998) New wiggler beamline at BSRF. J Sychrotron Rad 5: 530-532
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