Combination of a fluidic micro-oscillator and micro-actuator in LIGA-technique for medical application

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 761-764

  Gebhard, Ute ^a   Hein, Herbert ^a   Just, Elmar ^a   Ruther, Patrick ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FLUIDIC DEVICES; MACHINE DESIGN; MEDICAL APPLICATIONS; OSCILLATORS (ELECTRONIC); SYSTEMS ANALYSIS;

FLUIDIC OSCILLATOR; LINEAR ACTUATION DEVICE; LINEAR ACTUATOR; MINIATURIZED DRIVING; WATER DRIVEN MICROSYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 0030648880     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)