Fabrication of thick film magnetic cores for high frequency using LIGA process

IEEE Transactions on Magnetics

Volumn 37, Issue 4 I, 2001, Pages 2888-2890

  Takimoto, Shinsuke ^b   Ueno, Hiroshi ^b   Sugiyama, Susumu ^a,b   Yamaguchi, Masahiro ^a,c   Baba, Makoto ^c   Arai, Ken Ichi ^a,c  

^a IEEE   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

Eddy current; High aspect ratio; LIGA process; Magnetic core; Micromachining

Indexed keywords

ASPECT RATIO; ELECTROFORMING; MAGNETIC CORES; MAGNETIC HYSTERESIS; MAGNETIC PERMEABILITY; MICROMACHINING; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

PERMALLOYS;

MAGNETIC THICK FILMS;

EID: 0035386536     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.951337     Document Type: Article

References (9)

1. A magnetic thin-film inductor and its application to a MHz switching dc-dc converter
2. A Microfabricated transformer for high-frequency power or signal conversion
3. The LIGA process-A microfabrication technology
4. The relation between winding thickness and power dissipation
5. High frequency magnetic properties of CoNbZr amorphous cores for thin film inductor
6. An X-ray mask with a low-stress controlled polysilicon membrane in use for high aspect ratio pattern lithography
7. Development of multilayer flux sensing coil and its application to 1 MHz-3.5 GHz thin film permeance meter