-
1
-
-
0022717983
-
-
E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Munchmeyer, Microelectron. Eng. 4 (1986) p. 35.
-
(1986)
Microelectron. Eng.
, vol.4
, pp. 35
-
-
Becker, E.W.1
Ehrfeld, W.2
Hagmann, P.3
Maner, A.4
Munchmeyer, D.5
-
2
-
-
0031221057
-
-
H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger, J. Micromech. Microeng. 7 (1997) p. 121.
-
(1997)
J. Micromech. Microeng.
, vol.7
, pp. 121
-
-
Lorenz, H.1
Despont, M.2
Fahrni, N.3
LaBianca, N.4
Renaud, P.5
Vettiger, P.6
-
3
-
-
0032753082
-
-
A.A. Avon, R. Braff, C.C. Lin, H.H. Sawin, and M.A. Schmidt, J. Electrochem. Soc. 146 (1) (1999) p. 339.
-
(1999)
J. Electrochem. Soc.
, vol.146
, Issue.1
, pp. 339
-
-
Avon, A.A.1
Braff, R.2
Lin, C.C.3
Sawin, H.H.4
Schmidt, M.A.5
-
5
-
-
85037279968
-
-
Institute of Microtechnology Mainz Microsync Home Page, www.imm-mainz.de/rnicrosync/ (accessed March 2001).
-
-
-
-
8
-
-
85037271561
-
-
in preparation
-
P. Bley, K. Bade, S.J. Chung, A. El-Kholi, T. Hanemann, H. Heckele, W. Pfleging, and T. Schaller, "Non IC Compatible Technologies," Microsystem Roadmap, in preparation.
-
"Non IC Compatible Technologies," Microsystem Roadmap
-
-
Bley, P.1
Bade, K.2
Chung, S.J.3
El-Kholi, A.4
Hanemann, T.5
Heckele, H.6
Pfleging, W.7
Schaller, T.8
-
10
-
-
85037285241
-
-
JENOPTIK Mikrotechnik GmbH Home Page, www.jo-mikrotechnik.com (accessed March 2001).
-
-
-
-
11
-
-
85037273414
-
-
Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: x-ray scanner for deep lithography
-
Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: x-ray scanner for deep lithography, www.immmainz.de/english/developm/made_equ/xray .html (accessed March 2001).
-
-
-
-
12
-
-
0002999277
-
-
J. Zanghellini, S. Achenback, A. El-Kholi, J. Mohr, and F.J. Patenburg, Microsys. Technol. 4 (1998) p. 94.
-
(1998)
Microsys. Technol.
, vol.4
, pp. 94
-
-
Zanghellini, J.1
Achenback, S.2
El-Kholi, A.3
Mohr, J.4
Patenburg, F.J.5
-
13
-
-
0000001239
-
-
W. Ehrfeld, V. Hessel, H. Lowe, C. Schulz, and L. Weber, Microsys. Technol. 5 (3) (1999) p. 105.
-
(1999)
Microsys. Technol.
, vol.5
, Issue.3
, pp. 105
-
-
Ehrfeld, W.1
Hessel, V.2
Lowe, H.3
Schulz, C.4
Weber, L.5
-
14
-
-
85037275908
-
-
Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: electroforming apparatus
-
Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: electroforming apparatus, www.imm-mainz.de/ english/developm/made_equ/apparat.html (accessed March 2001).
-
-
-
-
16
-
-
0032656686
-
-
edited by G. Courtois, S. Crary, W. Ehrfeld, H. Fujita, J.M. Karam, and K. Markus SPIE - The International Society for Optical Engineering, Bellingham, WA
-
V. Piotter, T. Benzler, T. Hanemann, H. Woellmer, R. Ruprecht, and J. Hausselt, in Proc. SPIE Design, Test, and Microfabrication of MEMS and MOEMS Vol. 3680, edited by G. Courtois, S. Crary, W. Ehrfeld, H. Fujita, J.M. Karam, and K. Markus (SPIE - The International Society for Optical Engineering, Bellingham, WA, 1999) p. 456.
-
(1999)
Proc. SPIE Design, Test, and Microfabrication of MEMS and MOEMS
, vol.3680
, pp. 456
-
-
Piotter, V.1
Benzler, T.2
Hanemann, T.3
Woellmer, H.4
Ruprecht, R.5
Hausselt, J.6
-
17
-
-
0010054829
-
-
R. Knitter, E. Gunther, U. Maciejewski, and C. Odemer, Ceram. Forum Int. 71 (9) (1994) p. 549.
-
(1994)
Ceram. Forum Int.
, vol.71
, Issue.9
, pp. 549
-
-
Knitter, R.1
Gunther, E.2
Maciejewski, U.3
Odemer, C.4
-
19
-
-
0012009709
-
-
SAND99-0746 Sandia National Laboratories, Albuquerque, NM, April
-
J.T. Feddema, R. Simon, M. Polosky, and T. Christenson, "Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components," SAND99-0746 (Sandia National Laboratories, Albuquerque, NM, April 1999).
-
(1999)
Ultra-precise Assembly of Micro-electromechanical Systems (MEMS) Components
-
-
Feddema, J.T.1
Simon, R.2
Polosky, M.3
Christenson, T.4
-
20
-
-
85037288044
-
-
STEAG microParts GmbH Home Page, www.microparts.de (accessed March 2001).
-
-
-
-
21
-
-
85037272169
-
-
Institute of Microtechnology Mainz Home Page, www.imm-mainz.de (accessed March 2001).
-
-
-
-
22
-
-
85037277477
-
-
AXSUN Technologies Home Page, www. axsun.com (accessed March 2001).
-
-
-
|