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Volumn 26, Issue 4, 2001, Pages 337-340

Liga technologies and applications

(1)  Hruby, Jill a  

a NONE

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000518739     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2001.76     Document Type: Article
Times cited : (70)

References (22)
  • 5
    • 85037279968 scopus 로고    scopus 로고
    • Institute of Microtechnology Mainz Microsync Home Page, www.imm-mainz.de/rnicrosync/ (accessed March 2001).
  • 10
    • 85037285241 scopus 로고    scopus 로고
    • JENOPTIK Mikrotechnik GmbH Home Page, www.jo-mikrotechnik.com (accessed March 2001).
  • 11
    • 85037273414 scopus 로고    scopus 로고
    • Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: x-ray scanner for deep lithography
    • Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: x-ray scanner for deep lithography, www.immmainz.de/english/developm/made_equ/xray .html (accessed March 2001).
  • 14
    • 85037275908 scopus 로고    scopus 로고
    • Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: electroforming apparatus
    • Institute of Microtechnology Mainz, Developments/IMM-Made Equipment Web page: electroforming apparatus, www.imm-mainz.de/ english/developm/made_equ/apparat.html (accessed March 2001).
  • 20
    • 85037288044 scopus 로고    scopus 로고
    • STEAG microParts GmbH Home Page, www.microparts.de (accessed March 2001).
  • 21
    • 85037272169 scopus 로고    scopus 로고
    • Institute of Microtechnology Mainz Home Page, www.imm-mainz.de (accessed March 2001).
  • 22
    • 85037277477 scopus 로고    scopus 로고
    • AXSUN Technologies Home Page, www. axsun.com (accessed March 2001).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.