High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

Microsystem Technologies

Volumn 2, Issue 4, 1996, Pages 174-177

  Fahrenberg, J ^a   Schaller, Th ^a   Bacher, W ^a   El Kholi, A ^a   Schomburg, W K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001329821     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050039     Document Type: Article

References (8)

1. Becker EW; Ehrfeld W; Hagmann P; Maner A; Münchmeyer D (1986) "Fabrication of microstructures with high aspect ratios and great structural heights by Synchrotron Radiation Lithography, galvanoforming and plastic molding (LIGA-process)", Microelectronic Engineering 4, p. 35-56
2. Elders J; Jansen HV; Elwenspoek M; Ehrfeld W (1995) "DEEMO: A new technology for the fabrication of microstructures", Proceedings Micro Electro mechanical systems '95, Amsterdam, p. 238-243
3. Fahrenberg J; Bier W; Maas D; Menz W; Ruprecht R; Schomburg WK (1995) "Microvalve system fabricated by thermoplastic molding", J. Micromech. and Microeng. 5, p. 169-171
4. Harmening M; Bacher W; Bley P; El Kholi A; Kalb H; Menz W; Michel A; Mohr J (1992) "Molding of three-dimensional microstructures by the LIGA Process", Proceedings Micro Electro Mechanical Systems '92, Travemünde, p. 202-207
5. Kalb H; Bacher W; Harmening M; Ruprecht R (1995) "Grundlegende Untersuchungen zur Fertigung gestufter Mikrostrukturen aus fluorierten Polymeren nach dem LIGA Verfahren", FZKA-Bericht 5576 (1995)
6. Maas D; Büstgens B; Fahrenberg J; Keller W; Seidel D (1994) "Application of adhesive bonding for the integration of microfluidic components", proceedings actuator '94, Bremen, p. 75-78
7. Schaller Th; Bier W; Linder G; Schubert K (1995) "Realization of microstructured mold inserts using mechanical microengineering methods", HARMST '95, Karlsruhe, this issue
8. Schomburg WK; Maas D; Bacher W; Büstgens B; Fahrenberg J; Menz W; Seidel D (1995) "Assembly for micromechanics and LIGA", J. Micromech. and Microeng. 5, p. 57-63