A variable reluctance stepping microdynamometer

Microsystem Technologies

Volumn 2, Issue 3, 1996, Pages 139-143

  Christenson, T R ^a   Guckel, H ^b   Klein, J ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042568599     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050031     Document Type: Article

References (7)

1. Becker EW; Ehrfeld W; Hagmann P; Moser A; Münchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoformung, and plastic moulding (LIGA process). Microelectronic Engineering 4: 35-56
2. Christenson TR; Klein J; Guckel H (1995) An electromagnetic microdynamometer. Proc. Mirco Electro Mechanical Systems Workshop, Amsterdam, The Netherlands, 1995 (IEEE, Piscataway, NJ) 386-391
3. Guckel H; Skrobis KJ; Klein J; Christenson TR (1994) Micromechanics via x-ray assisted processing. J. Vac. Sci. Technol. A 12(4): 2559-2564
4. Guckel H; Christenson TR; Skrobis KJ; Klein J; Karaowsky M (1993) Design and testing of planar magnetic micromotors fabricated by deep X-ray lithography and electroplating. Proc 7th Interntl. Conf. on Solid-State Sensors and Actuators, Yokohama, Japan, 1993 (IEEJ, Tokyo) 76-79
5. Jacobsen SC; Price RH; Wood JE; Rytting TH; Rafaelof M (1989) A design overview of an eccentric-motion electrostatic microactuator. Sensors and Actuators 20: 1-16
6. Mathieson D; Robertson BJ; Beerschwinger U; Yang SJ; Reuben RL; Addlesee AJ; Spencer J; Lawes B.A (1994) Micro torque measurements for a prototype turbine. J. Micromech. Microeng. 4: 129-139
7. Miller TJE (1989) Brushless permanent-magnet and reluctance motor drives. (Oxford University Press, New York)