Design and fabrication of a LIGA milliengine

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 765-768

  Garcia, Ernest J ^a   Christenson, Todd R ^a   Polosky, Marc A ^a   Jojola, Andres A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MACHINE DESIGN; MACHINING; MICROELECTROMECHANICAL DEVICES; MILLIMETER WAVE DEVICES; MINIATURE INSTRUMENTS;

MAGNETIC ACTUATOR; MILLIENGINE; MINIATURE MACHINING TECHNIQUE;

ACTUATORS;

EID: 0030655333     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)