LIGA and related technologies for industrial application

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 785-789

  Menz, Wolfgang ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Industrial applications; LIGA technique

Indexed keywords

EID: 0000450003     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80056-8     Document Type: Article

References (6)

1. W. Bier, B. Büstgens, J. Mohr, C. Müller, W.K. Schomburg, O. Fromhein, O. Kühner, D. Radloff and J. Reichert, Ein Mikrosystem zur optischen Schadstoffanalyse, FZK-Nachrichten, 27 (1995) 11.
2. C. Müller, O. Fromhein, J. Göttert, T. Kühner and J. Mohr, Microspectrometer system based on integrated optic components in polymers as spectral detection system for the VIS- and NIR-range, ECIO '95, 7th Eur. Conf. Integrated Optics, Delft, Netherlands, 3-6 April, 1995, pp. 491-494.
3. B. Büstgens, W. Bacher, W. Menz and W.K. Schomburg, Micropump manufactured by thermoplastic molding, Proc. MEMS 1994, p. 18.
4. M. Strohrmann, F. Eberle, O. Fromhein, W. Keller, O. Krömer, T. Kühner, K. Lindemann, J. Mohr, J. Schulz and H. Reicht, Smart acceleration sensor system based on LIGA micro mechanics, Microsystem Technologies 94, 4th Int. Conf. Micro Electro, Opto, Mechanical Systems Components, Berlin, Germany, 19-21 Oct., 1994, pp. 753-762.
5. R. Ruprecht, A. Both and W. Bacher, Plastic molding and electroforming of LIGA microstructures on microelectronic circuits, Workshop Digest, MicroMechanics Europe 1993, Neuchâtel, Switzerland, 1993, pp. 93-96.
6. M. Strohrmann, P. Bley, O. Fromhein and J. Mohr, Acceleration sensor with integrated compensation of temeprature effects fabricated by the LIGA process, Sensors and Actuators A, 41-42 (1994) 426-429.