Optical performance of high-aspect LIGA gratings II

Optical Engineering

Volumn 37, Issue 11, 1998, Pages 2878-2884

  Cox, J A ^a   Dobson, D C ^b   Ohnstein, T ^a   Zook, J D ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

^b TEXAS A AND M UNIVERSITY   (United States)

Author keywords

Grating; Infrared; LIGA; Maxwell's equations; Spectral filter; Tunable filter

Indexed keywords

EID: 0342563245     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601875     Document Type: Article

References (18)

1. A. T. Pritt, Jr., P. N. Kupferman, S. J. Young, and R. A. Keller, "Imaging LWIR spectrometers for remote sensing applications," in Infrared Imaging Systems: Design, Analysis, Modeling, and Testing VIII, G. Holst, Ed., Proc. SPIE 3063, 138-49 (1997).
2. I. C. Chang, "Tunable acousto-optic filters: an overview," Opt. Eng. 16, 455-460 (1977).
3. A. K. Jain, D. E. Stoltzmann, G. R. Knowles, J. G. Droessler, and D. Johnson, "Dual-tunable Fabry-Pérot spectrally agile filter," Opt. Eng. 23, 159-66 (1984).
4. J. T. Knudtson, D. S. Levy, and K. C. Herr, "Electronically tunable, first-order Fabry-Pérot infrared filter," Opt. Eng. 35, 2313-2320 (1996).
5. J. Ferraro and L. Basile, Ed., Fourier Transform Infrared Spectroscopy, Academic Press, New York (1979).
6. N. F. Raley, D. R. Ciarlo, J. C. Koo, B. Beiriger, J. Trujillo, C. Yu, G. Loomis and R. Chow, "A Fabry-Perot micro-interferometer for visible wavelengths," in Proc. Solid-State Sensors and Actuators Workshop, pp. 170-173, IEEE (1992).
7. M. Blomberg, O. Rusanen, K. Keranen, and A. Lehto, "A silicon microsystem-miniaturized infrared spectrometer," Proc. Transducers '97, Technical Digest of 1997 International Conf. On Solid-State Sensors and Actuators, pp. 1257-1258. IEEE, Chicago (1997).
8. E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Munchmeyer, "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA) process," Microelectron. Eng. 4, 35-56 (1986).
9. T. R. Ohnstein, J. D. Zook, J. A. Cox, B. D. Speldrich, T. J. Wagener, H. Guckel, T. R. Christenson, J. Klein, T. Earles, and I. Glasgow, "Tunable IR filters based on flexible metallic microstructures," in Proc. MEMS'95, Micro Electro Mechanical Systems, pp. 170-174, IEEE, Amsterdam (1995).
10. H. Guckel, K. J. Skrobis, T. R. Christenson, J. Klien, S. Han, B. Choi, E. G. Lovell, and T. W. Chapman, "On the application of deep x-ray lithography with sacrificial layers to sensor and actuator construction," in Proc. Transducers '91, 1991 Int. Conf. on Solid-State Sensors and Actuators, IEEE, San Francisco (1991).
11. T. R. Ohnstein, J. D. Zook, and H. B. French, "Tunable IR filters with integral electromagnetic actuators," in Technical Digest of the 1996 Solid-State Sensor and Actuator Workshop, pp. 196-199, Transducers Research Foundation, Inc., Hilton Head Island, SC (1996).
12. J. A. Cox, J. D. Zook, T. Ohnstein, and D. C. Dobson, "Optical performance of high aspect LIGA gratings," Opt. Eng. 36, 1367-1373 (1997).
13. D. C. Dobson, "A variational method for electromagnetic diffraction in biperiodic structures," RAIRO Modél. Math. Anal Numér. 28, 419-439 (1994).
14. D. Dobson and J. A. Cox, "Mathematical modeling for diffractive optics," in Diffractive and Miniaturized Optics, Crit, Rev. CR49, 32-53 (1994).
15. G. Bao, D. Dobson, and J. A. Cox, "Mathematical studies in rigorous grating theory," J. Opt. Soc. Am. A 12, 1029-1042 (1995).
16. P. M. Morse, Vibration and Sound, 2nd ed., pp. 255-285, McGraw-Hill, New York (1948).
17. E. D. Palik, Ed., Handbook of Optical Constants of Solids I, pp. 313-323, Academic Press, Orlando (1985).
18. J. W. Goodman, Introduction to Fourier Optics, pp. 48-51, McGraw-Hill. San Francisco (1968).