Microspectrometer system for the near infrared wavelength range based on the LIGA technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3912, Issue , 2000, Pages 141-149

  Krippner, Peter ^a   Kuehner, T ^a   Mohr, Juergen ^a   Saile, Volker ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; ANALOG TO DIGITAL CONVERSION; ELECTROOPTICAL EFFECTS; FIBER OPTICS; MICROOPTICS; OPTICAL WAVEGUIDES; PHOTODETECTORS; SEMICONDUCTING INDIUM GALLIUM ARSENIDE;

MICROSPECTROMETERS;

INFRARED SPECTROMETERS;

EID: 0033889542     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)