Micro gear pumps for dosing of viscous fluids

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 230-232

  Dopper J ^a   Clemens, M ^a   Ehrfeld, W ^a   Jung, S ^a   Kamper K P ^a   Lehr, H ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; VISCOUS FLOW;

MICROGEAR PUMPS;

PUMPS;

EID: 0031224229     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/040     Document Type: Article

References (3)

1. Ehrfeld W and Lehr H 1995 Radiat. Phys. Chem. 45 349-65
2. Döpper J, Clemens M, Ehrfeld W, Kämper K-P and Lehr H 1996 Proc. ACTUATOR '96 pp 37-40)
3. Ivantysyn J and Ivantysyn M 1993 Hydrostatische Pumpen und Motoren (Würzburg: Vogel)