X-ray transmission lenses by deep X-ray lithography and LIGA technique: First results and fundamental limits

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 508-517

  Kupka, R K ^a   Bouamrane, F ^a   Roulliay, M ^a   Megtert, S ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BERYLLIUM; BORON; ELECTROMAGNETIC DISPERSION; ELECTROPLATING; FABRICATION; FOCUSING; LENSES; LITHIUM; MICROOPTICS; POLYMETHYL METHACRYLATES; SURFACE ROUGHNESS; X RAY LITHOGRAPHY;

X RAY TRANSMISSION LENSES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032665197     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341240     Document Type: Conference Paper

References (18)