Liga - A fabrication technology for industry?

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4593, Issue , 2001, Pages 145-155

  Lawes, R A ^a   Arthur, G ^a   Schneider, A ^a  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRODEPOSITION; FABRICATION; GOLD; LASER ABLATION; MICROSTRUCTURE; PHOTORESISTS; STRESS ANALYSIS; SYNCHROTRON RADIATION;

HIGH ASPECT RATIO STRUCTURES;

MASKS;

EID: 0035768550     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448845     Document Type: Conference Paper

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