A review of microvalves

Journal of Micromechanics and Microengineering

Volumn 16, Issue 5, 2006, Pages

  Oh, Kwang W ^a,c   Ahn, Chong H ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b University of Cincinnati   (United States)

^c the State University of New York   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW CONTROL; FLUID DYNAMICS; FLUIDIC DEVICES; MICROACTUATORS; SEALING (CLOSING); VACUUM;

COMMERCIALIZATION; MICROFLUIDIC SYSTEMS; MICROVALVES; MINIATURIZATION;

VALVES (MECHANICAL);

EID: 33744461297     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/5/R01     Document Type: Article

References (243)

1. Kilby J S 2000 The integrated circuit's early history Proc. IEEE 88 109-11
2. Petersen K E 1982 Silicon as mechanical material Proc. IEEE 70 420-57
3. Terry S C, Jerman J H and Angell J B 1979 A gas chromatographic air analyzer fabricated on a silicon wafer IEEE Trans. Electron Devices 26 1880-6
4. Manz A, Graber N and Widmer H M 1990 Miniaturized total analysis systems: a novel concept for chemical sensing Sensors Actuators B 1 244-8
5. Reyes D R, Iossifidis D, Auroux P-A and Manz A 2002 Micro total analysis systems: 1. Introduction, theory, and technology Anal. Chem. 74 2623-36
6. Auroux P-A, Iossifidis D, Reyes D R and Manz A 2002 Micro total analysis systems: 2. Analytical standard operations and applications Anal. Chem. 74 2637-52
7. Vilkner T, Janasek D and Manz A 2004 Micro total analysis systems: recent developments Anal. Chem. 76 3373-86
8. Venter J C et al 2001 The sequence of the human genome Science 291 1304-51
9. Kricka L J and Wilding P 2003 Microchip PCR Anal. Bioanal. Chem. 377 820-5
10. Woolley A T, Hadley D, Landre P, deMello A J, Mathies R A and Northrup M A 1996 Functional integration of PCR amplification and capillary electrophoresis in a microfabricated DNA analysis device Anal. Chem. 68 4081-6
11. Goedecke N, McKenna B, El-Difrawy S, Carey L, Matsudaira P and Ehrlich D 2004 A high-performance multilane microdevice system designed for the DNA forensics laboratory Electrophoresis 25 1678-86
12. Hadd A G, Raymond D E, Halliwell J W, Jacobson S C and Ramsey J M 1997 Microchip device for performing enzyme assays Anal. Chem. 69 3407-12
13. Herr A E, Molho J I, Drouvalakis K A, Mikkelsen J C, Utz P J, Santiago J G and Kenny T W 2003 On-chip coupling of isoelectric focusing and free solution electrophoresis for multidimensional separations Anal. Chem. 75 1180-7
14. Chiem N and Harrison D J 1997 Microchip-based capillary electrophoresis for immunoassays: analysis of monoclonal antibodies and theophylline Anal. Chem. 69 373-8
15. Chung B G, Flanagan L A, Rhee S W, Schwartz P H, Lee A P, Monuki E S and Jeon N L 2005 Human neural stem cell growth and differentiation in a gradient-generating microfluidic device Lab. Chip 5 401-6
16. Li P C H and Harrison D J 1997 Transport, manipulation, and reaction of biological cells on-chip using electrokinetic effects Anal. Chem. 69 1564-8
17. Laser D J and Santiago J G 2004 A review of micropumps J. Micromech. Microeng. 14 R35-64
18. Woias P 2005 Micropumps-past, progress and future prospects Sensors Actuators B 105 28-38
19. Nguyen N-T and Wu Z 2005 Micromixers-a review J. Micromech. Microeng. 15 R1-6
20. Fredrickson C K and Fan Z H 2004 Macro-to-micro interfaces for microfluidic devices Lab. Chip 4 526-33
21. Hesketh P J, Bintoro J S and Luharuka R 2004 Microvalve for fuel cells and miniature gas chromatographic system Sensors Update 13 233-302
22. Huang Y, Mather E L, Bell J L and Madou M 2002 MEMS-based sample preparation for molecular diagnostics Anal. Bioanal. Chem. 372 49-65
23. Gravesen P, Branebjerg J and Jensen O S 1993 Microfluidics-a review J. Micromech. Microeng. 3 168-82
24. Shoji S and Esashi M 1994 Microflow devices and systems J. Micromech. Microeng. 4 157-71
25. Elwenspoek M, Lammerink T S J, Miyakei R and Ruitman J H J 1994 Towards integrated microliquid handling systems J. Micromech. Microeng. 4 227-45
26. Thielicke E and Obermeier E 2000 Microactuators and their technologies Mechatronics 10 431-55
27. Kamholz A E 2004 Proliferation of microfluidics in literature and intellectual property Lab. Chip 4 16N-20
28. Nguyen N-T and Wereley S T 2002 Fundamentals and Applications of Microfluidics (Boston, MA: Artech House)
29. Kovacs G T A 1998 Micromachined Transducers Sourcebook (New York: McGraw-Hill)
30. Yanagisawa K, Kuwano H and Tapo A 1993 An electromagnetically driven microvalve Proc. Transducers '93 pp 102-5
31. Meckes A, Behrens J, Kayser O, Benecke W, Becker T and Muller G 1999 Microfluidic system for the integration and cyclic operation of gas sensors Sensors Actuators A 76 478-83
32. Bae B, Kee H, Kim S, Lee Y, Sim T, Kim Y and Park K 2003 In vitro experiment of the pressure regulating valve for a glaucoma implant J. Micromech. Microeng. 13 613-9
33. Bae B, Kim N, Kee H, Kim S-H, Lee Y, Lee S and Park K 2002 Feasibility test of an electromagnetically driven valve actuator for glaucoma treatment J. Microelectromech. Syst. 11 344-54
34. Krusemark O, Feustel A and Muller J 1998 Micro ball valve for fluidic micropumps and gases Proc. Micro Total Analysis Systems '98 Workshop pp 399-402
35. Oh K W, Rong R and Ahn C H 2001 In-line micro ball valve through polymer tubing Proc. microTAS 2001 pp 407-8
36. Fu C, Rummler Z and Chomburg W 2003 Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding J. Micromech. Microeng. 13 S96-102
37. Choi J-W, Oh K W, Thomas J H, Heineman W R, Halsall H B, Nevin J H, Helmicki A J, Henderson H T and Ahn C H 2002 An integrated microfluidic biochemical detection system for protein analysis with magnetic bead-based sampling capabilities Lab. Chip 2 27-30
38. Oh K W, Rong R and Ahn C H 2005 Miniaturization of pinch-type valves and pumps for practical micro total analysis system integration J. Micromech. Microeng. 15 2449-55
39. Sadler D J, Oh K W, Ahn C H, Bhansali S and Henderson H T 1999 A new magnetically actuated microvalve for liquid and gas control applications 10th Int. Conf. on Solid-State Sensors and Actuators (Transducers '99) pp 1812-5
40. Cho H J, Oh K W, Ahn C H, Boolchand P and Nam T-C 2001 Stress analysis of silicon membranes with electroplated permalloy films using Raman scattering IEEE Trans. Magn. 37 2749-51
41. Choi J-W et al 2001 Development and characterization of microfluidic devices and systems for magnetic bead-based biochemical detection Biomed. Microdevices 3 191-200
42. Oh K W, Han A, Bhansali S and Ahn C H 2002 A low-temperature bonding technique using spin-on fluorocarbon polymers to assemble microsystems J. Micromech. Microeng. 12 187-91
43. Sato K and Shikida M 1994 An electrostatically actuated gas valve with an S-shaped film element J. Micromech. Microeng. 4 205-9
44. Shikida M, Sato K, Tanaka S, Kawamura Y and Fujisaki Y 1994 Electrostatically driven gas valve with high conductance J. Microelectromech. Syst. 3 76-80
45. Goll C, Bacher W, Bustgens B, Maas D, Ruprecht R and Schomburg W K 1997 An electrostatically actuated polymer microvalve equipped with a movable membrane electrode J. Micromech. Microeng. 7 224-6
46. Robertson J K and Wise K D 1998 A low pressure micromachined flow modulator Sensors Actuators A 71 98-106
47. Schaible J, Vollmer J, Zengerle R, Sandmaier H and Strobelt T 2001 Electrostatic microvalves in silicon with 2-way function for industrial applications 11th Int. Conf. on Solid-State Sensors and Actuators (Transducers '01) pp 928-31
48. Van der Wijngaart W, Ask H, Enoksson P and Stemme G 2002 A high-stroke, high-pressure electrostatic actuator for valve applications Sensors Actuators A 100 264-71
49. Yobas L, Durand D M, Skebe G G, Lisy F J and Huff M A 2003 A novel integrable microvalve for refreshable braille display system J. Microelectromech. Syst. 12 252-63
50. Yobas L, Huff M A, Lisy F J and Durand D M 2001 A novel bulk micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display J. Microelectromech. Syst. 10 187-96
51. Teymoori M M and Abbaspour-Sani E 2005 Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications Sensors Actuators A 117 222-9
52. Epstein A H et al 1997 Power MEMS and microengines Proc. IEEE Conf on Solid State Sensors and Actuators (Transducer '97) pp 753-6
53. Moon H S, Choi D and Spearing S M 2004 Development of Si/SiC hybrid structures for elevated temperature micro-turbomachinery J. Microelectromech. Syst. 13 676-87
54. Yang X, Holke A, Jacobson S A, Lang J H, Schmidt M A and Umans S D 2004 An electrostatic, on/off microvalve designed for gas fuel delivery for the MIT microengine J. Microelectromech. Syst. 13 660-8
55. Kirby B J, Shepodd T J and Hasselbrink E F 2002 Voltage-addressable on/off microvalves for high-pressure microchip separations J. Chromatogr. A 979 147-54
56. Li H Q, Roberts D C, Steyn J L, Turner K T, Yaglioglu O, Hagood N W, Spearing S M and Schmidt M A 2004 Fabrication of a high frequency piezoelectric microvalve Sensors Actuators A 111 51-6
57. Roberts D C, Li H, Steyn J L, Yaglioglu O and Spearing S M 2003 A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems J. Microelectromech. Syst. 12 81-92
58. Rogge T, Rummler Z and Schomburg W K 2004 Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process Sensors Actuators A 110 206-12
59. Shao P, Rummler Z and Schomburg W K 2004 Polymer micro piezo valve with a small dead volume J. Micromech. Microeng. 14 305-9
60. Peirs J, Reynaert D and van Brussel H 2000 Design of miniature parallel manipulators for integration in a self-propelling endoscope Sensors Actuators A 85 409-17
61. Chakraborty I, Tang W C, Bame D P and Tang T K 2000 MEMS micro-valve for space applications Sensors Actuators A 83 188-93
62. Yang E-H, Lee C, Mueller J and George T 2004 Leak-tight piezoelectric microvalve for high-pressure gas micropropulsion J. Microelectromech. Syst. 13 799-807
63. Waibel G, Kohnle J, Cernosa R, Storz M, Schmitt M, Ernst H, Sandmaier H, Zengerle R and Strobelt T 2003 Highly integrated autonomous microdosage system Sensors Actuators A 103 225-30
64. Ernst H, Willmann M, Goettsche T, Kohnle J, Sandmaier H and Zengerle R 2002 Microvalves for implantable microdosage systems Proc. Conf. on EMBS/BMES 2002 pp 1840-1
65. Goettsche T, Kohnle J, Willmann M, Ernst H, Spieth S, Tischler R, Messner S, Zengerle R and Sandmaier H 2005 Novel approaches to particle tolerant valves for use in drug delivery systems Sensors Actuators A 118 70-7
66. Jerman H 1994 Electrically activated, normally closed diaphragm valves J. Micromech. Microeng. 4 210-6
67. Barth P W 1995 Silicon microvalves for gas flow control Proc. 8th Int. Conf. on Solid-State Sensors and Actuators (Transducers '95) pp 276-7
68. Rich C A and Wise K D 2003 A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing J. Microelectromech. Syst. 12 201-8
69. Ruzzu A, Bade K, Fahrenberg J and Maas D 1998 Positioning system for catheter tips based on an active microvalve system J. Micromech. Microeng. 8 161-4
70. Takao H, Miyamura K, Ebi H, Ashiki M, Sawada K and Ishida K 2005 A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon Sensors Actuators A 119 468-75
71. Ho C-M, Yang X, Grosjean C and Tai Y-C 1998 A MEMS thermopneumatic silicone rubber membrane valve Sensors Actuators A 64 101-8
72. Yang X, Grosjean C and Tai Y-C 1999 Design, fabrication, and testing of micromachined silicone rubber membrane valves J. Microelectromech. Syst. 8 393-402
73. Baechi D, Buser R and Dual J 2002 A high density microchannel network with integrated valves and photodiodes Sensors Actuators A 95 77-83
74. Baechi D and Buser R 2000 Suspension handling system Sensors Actuators B 63 195-200
75. Kim J-H, Na K-H, Kang C J, Jeon D and Kim Y-S 2004 A disposable thermopneumatic-actuated microvalve stacked with PDMS layers and ITO-coated glass Microelectron. Eng. 73-74 864-9
76. Wolf R H and Heuer A H 1995 TiNi (shape memory) films on silicon for MEMS applications J. Microelectromech. Syst. 4 206-12
77. Kahn H, Huff M A and Heuer A H 1998 The TiNi shape-memory alloy and its applications for MEMS J. Micromech. Microeng. 8 213-21
78. Kohl M, Skrobanek K D and Miyazaki S 1999 Development of stress-optimised shape memory microvalves Sensors Actuators A 72 243-50
79. Kohl M, Dittmann D, Quandt E, Winzek B, Miyazaki S and Allen D M 1999 Shape memory microvalves based on thin films or rolled sheets Mater. Sci. Eng. A 273-5 784-8
80. Kohl M, Dittmann D, Quandt E and Winzek B 2000 Thin film shape memory microvalves with adjustable operation temperature Sensors Actuators A 83 214-9
81. Liu Y, Kohl M, Okutsu K and Miyazaki S 2004 A TiNiPd thin film microvalve for high temperature applications Mater. Sci. Eng. A 378 205-9
82. Reynaerts D, Peirs J and Van Brussel H 1997 An implantable drug-delivery system based on shape memory alloy micro-actuaries Sensors Actuators A 61 455-62
83. Pemble C M and Towe B C 1999 A miniature shape memory alloy pinch valve Sensors Actuators A 77 145-8
84. Tamanaha C R, Whitman L J and Colton R J 2002 Hybrid macro-micro fluidics system for a chip-based biosensor J. Micromech. Microeng. 12 N7-17
85. Lisec T, Kreutzer M and Wagner B 1996 A bistable pneumatic microswitch for driving fluidic components Sensors Actuators A 54 746-9
86. Schomburg W K and Goll C 1998 Design optimization of bistable microdiaphragm valves Sensors Actuators A 64 259-64
87. Schomburg W K, Ahrens R, Bacher W, Martin J and Saile V 1999 AMANDA-surface micromachining, molding, and diaphragm transfer Sensors Actuators A 76 343-8
88. Goll C, Bacher W, Bustgens B, Maas D, Menz W and Schomburg W K 1996 Microvalves with bistable buckled polymer diaphragms J. Micromech. Microeng. 6 77-9
89. Ren H and Gerhard E 1997 Design and fabrication of a current-pulse- excited bistable magnetic microactuator Sensors Actuators A 58 259-64
90. Bohm S, Burger G J, Korthorst M T and Roseboom F 2000 A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator Sensors Actuators 80 77-83
91. Capanu M, Boyd J G and Hesketh P J 2000 Design, fabrication, and testing of a bistable electromagnetically actuated microvalve J. Microelectromech. Syst. 9 181-9
92. Wagner B, Quenzer H J, Hoerschelmann S, Lisec T and Juerss M 1996 Bistable microvalve with pneumatically coupled membranes 9th Ann. IEEE Int. MEMS Workshop pp 384-8
93. Bosh D, Heimhofer B, Muck G, Seidel H, Thumser U and Welser W 1993 A silicon microvalve with combined electromagnetic/electrostatic actuation Sensors Actuators A 37/38 684-92
94. Neagu C R, Gardeniers J G E, Elwenspoek M and Kelly J J 1996 An electrochemical microactuator: principle and first results J. Microelectromech. Syst. 5 2-9
95. Neagu C R, Gardeniers J G E, Elwenspoek M and Kelly J J 1997 An electrochemical active valve Electrochim. Acta 42 3367-13
96. Suzuki H and Yoneyama R 2003 Integrated microfluidic system with electrochemically actuated on-chip pumps and valves Sensors Actuators B 96 38-45
97. Hua S Z, Sachs F, Yang D X and Chopra H D 2002 Microfluidic actuation using electrochemically generated bubbles Anal. Chem. 74 6392-6
98. Takahashi K, Yoshino K, Hatano S, Nagayama K and Asano T 2001 Novel applications of thermally controlled microbubble driving system Proc. IEEE MEMS 2001 pp 286-9
99. English A E, Edelman E R and Tanaka T 2000 Polymer hydrogel phase transitions Experimental Methods in Polymer Science: Modern Methods in Polymer Research & Technology (New York: Academic) pp 547-89
100. Beebe D J, Moore J S, Bauer J M, Yu Q, Liu R H, Devadoss C and Jo B H 2000 Functional hydrogel structures for autonomous flow control inside microfluidic channels Nature 404 588-90
101. Liu R, Yu Q and Beebe D J 2002 Fabrication and characterization of hydrogel-based microvalves J. Microelectromech. Syst. 11 45-53
102. Eddington D T and Beebe D J 2004 A valved responsive hydrogel microdispensing device with integrated pressure source J. Microelectromech. Syst. 13 586-93
103. Baldi A, Gu Y, Loftness P E, Siegel R A and Ziaie B 2003 A hydrogel-actuated environmentally sensitive microvalve for active flow control J. Microelectromech. Syst. 12 613-21
104. Richter A, Kuckling D, Howitz S, Gehring T and Arndt K-F 2003 Electronically controllable microvalves based on smart hydrogels: magnitudes and potential applications J. Microelectromech. Syst. 12 748-53
105. Richter A, Howitz S, Kuckling D and Arndt K-F 2004 Influence of volume phase transition phenomena on the behavior of hydrogel-based valves Sensors Actuators B 99 451-8
106. Yu C, Mutlu S, Selvaganapathy P, Mastrangelo C H, Svec F and Frechet J M J 2003 Flow control valves for analytical microfluidic chips without mechanical parts based on thermally responsive monolithic polymers Anal. Chem. 75 1958-61
107. Hu Z, Zhang X and Li Y 1995 Synthesis and application of modulated polymer gels Science 269 525-7
108. Low L-M, Seetharaman S, He K-Q and Madou M J 2000 Microactuators toward microvalves for responsive controlled drug delivery Sensors Actuators B 67 149-60
109. Tanaka T, Nishio I, Sun S-T and Ueno-Nishio S 1982 Collapse of gels in an electric field Science 218 467-9
110. Suzuki A and Tanaka T 1990 Phase transition in polymer gels induced by visible light Nature 346 345-7
111. Kataoka K, Miyazaki H, Bunya M, Okano T and Sakurai Y 1998 Totally synthetic polymer gels responding to external glucose concentration: their preparation and application to on-off regulation of insulin release J. Am. Chem. Soc. 120 694-5
112. Miyata T, Asami N and Uragami T 1999 A reversibly antigen-responsive hydrogel Nature 399 766-9
113. Liu Y, Rauch C B, Stevens R L, Lenigk R, Yang J, Rhine D B and Grodzinski P 2002 DNA amplification and hybridization assays in integrated plastic monolithic devices Anal. Chem. 74 3063-70
114. Tashiro K, Ikeda S, Sekiguchi T, Shoji S, Makazu H, Funatsu T and Tsukita S 2001 Proc. Micro Total Analysis Systems (MicroTAS 2001) pp 471-3
115. Carlen E T and Mastrangelo C H 2002 Surface micromachined paraffin-actuated microvalve J. Microelectromech. Syst. 11 408-20
116. Selvaganapathy P, Carlen E T and Mastrangelo C H 2003 Electrothermally actuated inline microfluidic valve Sensors Actuators A 104 275-82
117. Klintberg L, Karlsson M, Stenmark L, Schweitz J-A and Thornell G 2002 A large stroke, high force paraffin phase transition actuator Sensors Actuators A 96 189-95
118. Klintberg L, Svedberg M, Nikolajeff F and Thornell G 2003 Fabrication of a paraffin actuator using hot embossing of polycarbonate Sensors Actuators A 103 307-16
119. Klintberg L, Karlsson M, Stenmark L and Thornell G 2003 A thermally activated paraffin-based actuator for gas-flow control in a satellite electrical propulsion system Sensors Actuators A 105 237-46
120. Pal R, Yang M, Johnson B N, Burke D T and Burns M A 2004 Phase change microvalve for integrated devices Anal. Chem. 76 3740-8
121. Liu R H, Yang J, Lenigk R, Bonanno J and Grodzinski P 2004 Single-use, thermally actuated paraffin valves for microfluidic applications Sensors Actuators B 98 328-36
122. Liu R H, Yang J, Lenigk R, Bonanno J and Grodzinski P 2004 Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection Anal. Chem. 76 1824-31
123. Gui L and Liu J 2004 Ice valve for a mini/micro flow channel J. Micromech. Microeng. 14 242-6
124. Yoshida K, Kikuchi M, Park J-H and Yokota S 2002 Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments Sensors Actuators A 95 227-33
125. Hatch A, Kamholz A E, Holman G, Yager P and Boringer K F 2001 A ferrofluidic magnetic micropump J. Microelectromech. Syst. 10 215-21
126. Yamahata C, Chastellain M, Parashar V K, Petri A, Hofmann H and Gijs M A M 2005 Plastic micropump with ferrofluidic actuation J. Microelectromech. Syst. 14 96-102
127. Hartshorne H, Backhouse C J and Lee W E 2004 Ferrofluid-based microchip pump and valve Sensors Actuators B 99 592-600
128. Hartshorne H, Ning Y, Lee W E and Backhouse C J 1998 Development of microfabricated valves for νTAS Proc. microTAS '98 Workshop pp 379-81
129. Oh K W, Namkoong K and Chinsung P 2005 A phase change microvalve using a meltable magnetic material: ferro-wax Proc. microTAS 2005
130. Oh K W, Park C and Namkoong K 2005 A world-to-chip microfluidic interconnection technology with dual functions of sample injection and sealing for a multichamber micro PCR chip Proc. IEEE MEMS 2005 pp 714-7
131. Oh K W, Park C, Namkoong K, Kim J, Ock K-C, Kim S, Kim Y-A, Cho Y-K and Ko C 2005 World-to-chip microfluidic interface with built-in valves for multichamber chip-based PCR assays Lab. Chip 5 845-50
132. Yang Z and Maeda R 2002 A world-to-chip socket for microfluidic prototype development Electrophoresis 23 3474-8
133. Yang Z and Maeda R 2003 Socket with built-in valves for the interconnection of microfluidic chips to macro constituents J. Chromatogr. A 1013 29-33
134. Hasegawa T, Ikuta K and Nakashima K 2003 10-way micro switching valve chip for multi-directional flow control Proc. microTAS 2003 Workshop pp 215-8
135. McMillan W A 2002 Real-time point-of-care molecular detection of infectious disease agents Am. Clin. Lab. (January/February) 29-31
136. Cepheid 2005 Sample in answer out GeneXpert brochure http://www.cepheid. com/Sites/cepheid/litpdfs/GX_Brochure_V2.pdf
137. Takao H, Ishida M and Sawada K 2001 A pneumatically-actuated silicon microvalve and its application to functional fluidic integrated circuits Tech. Dig. Papers 11th Int. Conf. on Solid-State Sensors and Actuators (Transducers '01) pp 946-9
138. Takao H, Ishida M and Sawada K 2002 A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks J. Microelectromech. Syst. 11 421-6
139. Takao H and Ishida M 2003 Microfluidic integrated circuits for signal processing using analogous relationship between pneumatic microvalve and MOSFET J. Microelectromech. Syst. 12 497-505
140. Esashi M 1996 Silicon micromachining for integrated microsystems Vacuum 47 469-74
141. Luque A, Quero J M, Hibert C, Fluckiger P and Ganan-Calvo A M 2005 Integrable silicon microfluidic valve with pneumatic actuation Sensors Actuators A 118 144-51
142. Lagally E T, Simpson P C and Mathies R A 2000 Monolithic integrated microfluidic DNA amplification and capillary electrophoresis analysis system Sensors Actuators B 63 138-46
143. Lagally E T, Medintz I and Mathies R A 2001 Single-molecule DNA amplification and analysis in an integrated microfluidic device Anal. Chem. 73 565-70
144. Lagally E T, Emrich C A and Mathies R A 2001 Fully integrated PCR-capillary electrophoresis microsystem for DNA analysis Lab. Chip 1 102-7
145. Grover W H, Skelley A M, Liu C N, Lagally E T and Mathies R A 2003 Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices Sensors Actuators B 89 315-23
146. Lagally E T, Scherer J R, Blazej R G, Toriello N M, Diep B A, Ramchandani M, Sensabaugh G F, Riley L W and Mathies R A 2004 Integrated portable genetic analysis microsystem for pathogen/infectious disease detection Anal. Chem. 76 3162-70
147. Ohori T, Shoji S, Miura K and Yotsumoto A 1998 Partly disposable three-way microvalve for a medical micro total analysis system Sensors Actuators A 64 57-62
148. Go J S and Shoji S 2004 A disposable, dead volume-free and leak-free in-plane PDMS microvalve Sensors Actuators A 114 438-44
149. Kanai M, Abe H, Munaka T, Fujiyama Y, Uchida D, Yamayoshi A, Nakanishi H, Murakamid A and Shoji S 2004 Micro chamber for cellar analysis integrated with negligible dead volume sample injector Sensors Actuators A 114 129-34
150. Lee S, Jeong W and Beebe D J 2003 Microfluidic valve with cored glass microneedle for microinjection Lab. Chip 3 164-7
151. Baek J Y, Park J Y, Ju J I, Lee T S and Lee S H 2005 A pneumatically controllable flexible and polymeric microfluidic valve fabricated via in situ development J. Micromech. Microeng. 15 1015-20
152. Hosokawa K and Maeda R 2000 A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique J. Micromech. Microeng. 10 415-20
153. Taylor M T, Nguyen P, Ching J and Petersen K E 2003 Simulation of microfluidic pumping in a genomic DNA blood-processing cassette J. Micromech. Microeng. 13 201-8
154. Yuen P K, Kricka L J and Wilding P 2000 Semi-disposable microvalves for use with microfabricated devices or microchips J. Micromech. Microeng. 10 401-9
155. Unger M A, Chou H-P, Thorsen T, Scherer A and Quake S R 2000 Monolithic microfabricated valves and pumps by multilayer soft lithography Science 288 113-6
156. Quake S R and Scherer A 2000 From micro to nano fabrication with soft materials Science 290 1536-40
157. Fu A Y, Chou H-P, Spence C, Arnold F A and Quake S R 2002 An integrated microfabricated cell sorter Anal. Chem. 74 2451-7
158. Studer V, Jameson R, Pellereau E, Pepin A and Chen Y 2004 A microfluidic mammalian cell sorter based on fluorescence detection Microelectron. Eng. 73-74 852-7
159. Wheeler A R, Throndset W R, Whelan R J, Leach A M, Zare R N, Liao Y H, Farrell K, Manger I D and Daridon A 2003 Microfluidic device for single-cell analysis Anal. Chem. 75 3581-6
160. Leach A M, Wheeler A R and Zare R N 2003 Flow injection analysis in a microfluidic format Anal. Chem. 75 967-72
161. Wang Y-C, Choi M H and Han J 2004 Two-dimensional protein separation with advanced sample and buffer isolation using microfluidic valves Anal. Chem. 76 4426-31
162. Chou H-P, Unger M A and Quake S R 2001 A microfabricated rotary pump Biomed. Microdevices 2 323-30
163. Liu J, Enzelberger M and Quake S R 2002 A nanoliter rotary device for polymerase chain reaction Electrophoresis 23 1531-6
164. Liu J, Hansen C and Quake S R 2003 Solving the 'World-to-Chip' interface problem with a microfluidic matrix Anal. Chem. 75 4718-23
165. Thorsen T, Maerkl S J and Quake S R 2002 Microfluidic large-scale integration Science 298 580-4
166. Lee J N, Park C and Whitesides G M 2003 Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices Anal. Chem. 75 6544-54
167. Rolland J P, Van Dam R M, Schorzman D A, Quake S R and DeSimone J M 2004 Solvent-resistant photocurable 'Liquid Teflon' for microfluidic device fabrication J. Am. Chem. Soc. 126 2322-3
168. Zengerle R and Richter M 1994 Simulation of microfluid systems J. Micromech. Microeng. 4 192-204
169. Zengerle R, Ulrich J, Kluge S, Richter M and Richter A 1995 A bidirectional silicon micropump Sensors Actuators A 50 81-6
170. Xu D, Wang L, Ding G, Zhou Y, Yu A and Cai B 2001 Characteristics and fabrication of NiTi/Si diaphragm micropump Sensors Actuators A 93 87-92
171. Yang E H, Han S W and Yang S S 1996 Fabrication and testing of a pair of passive bivalvular microvalves composed of p + silicon diaphragms Sensors Actuators A 57 75-8
172. Voigt P, Schrag G and Wachutka G 1998 Electrofluidic full-system modelling of a flap valve micropump based on Kirchhoffian network theory Sensors Actuators A 66 9-14
173. Gong Q, Zhou Z, Yang Y and Wang X 2000 Design, optimization and simulation on microelectromagnetic pump Sensors Actuators A 83 200-7
174. Koch M, Evans A G R and Brunnschweiler A 1997 Simulation and fabrication of micromachined cantilever valves Sensors Actuators A 62 756-9
175. Koch M, Evans A G R and Brunnschweiler A 1997 Characterization of micromachined cantilever valves J. Micromech. Microeng. 7 221-3
176. Ulrich J and Zengerle R 1996 Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method Sensors Actuators A 53 379-85
177. Oosterbroek R E, Berenschot J W, Schlautmann S, Krijnen G J M, Lammerink T S J, Elwenspoek M C and van den Berg A 1999 Designing, simulation and realization of in-plane operating micro valves, using new etching techniques J. Micromech. Microeng. 9 194-8
178. Sim W Y, Yoon H J, Jeong O C and Yang S S 2003 A phase-change type micropump with aluminum flap valves J. Micromech. Microeng. 13 286-94
179. Yun K-S, Cho I-J, Bu J-U, Kim C J and Yoon E 2002 A surface-tension driven micropump for low-voltage and low-power operations J. Microelectromech. Syst. 11 454-61
180. Paul B K and Terhaar T 2000 Comparison of two passive microvalve designs for microlamination architectures J. Micromech. Microeng. 10 15-20
181. Feng G-H and Kim E S 2004 Micropump based on PZT unimorph and one-way parylene valves J. Micromech. Microeng. 14 429-35
182. Li B, Chen Q, Lee D-G, Woolman J and Carman G P 2005 Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps Sensors Actuators A 117 325-30
183. Bien D C S, Mitchell S J N and Gamble H S 2003 Fabrication and characterization of a micromachined passive valve J. Micromech. Microeng. 13 557-62
184. Hu M, Du H, Ling S-F, Fu Y, Chen Q, Chow L and Li B 2004 A silicon-on-insulator based micro check valve J. Micromech. Microeng. 14 382-7
185. Chung S, Kim J K, Wang K C, Han D-C and Chang J-K 2003 Development of MEMS-based cerebrospinal fluid shunt system Biomed. Microdevices 5 311-21
186. Nguyen N-T and Truong T-Q 2004 A fully polymeric micropump with piezoelectric actuator Sensors Actuators B 97 137-43
187. Truong T-Q and Nguyen N-T 2004 A polymeric piezoelectric micropump based on lamination technology J. Micromech. Microeng. 14 632-8
188. Nguyen N-T, Truong T-Q, Wong K-K, Ho S-S and Low C L-N 2004 Micro check valves for integration into polymeric microfluidic devices J. Micromech. Microeng. 14 69-75
189. Wego A and Pagel L 2001 A self-filling micropump based on PCB technology Sensors Actuators A 88 220-6
190. Wego A, Richter S and Pagel L 2001 Fluidic microsystems based on printed circuit board technology J. Micromech. Microeng. 11 528-31
191. Bohm S, Olthuis W and Bergveld P 1999 A plastic micropump constructed with conventional techniques and materials Sensors Actuators A 77 223-8
192. Santra S, Holloway P and Batich C D 2002 Fabrication and testing of a magnetically actuated micropump Sensors Actuators B 87 358-64
193. -1 J. Micromech. Microeng. 3 236-8
194. Gott V L, Alejo D E and Cameron D E 2003 Mechanical heart valves: 50 years of evolution Ann. Thorac. Surg. 76 S2230-9
195. Carrozza M C, Croce N, Magnani B and Dario P 1995 A piezoelectric-driven stereolithography-fabricated micropump J. Micromech. Microeng. 5 177-9
196. Accoto D, Carrozza M C and Dario P 2000 Modelling of micropumps using unimorph piezoelectric actuator and ball valves J. Micromech. Microeng. 10 277-81
197. Yamahata C, Lacharme F, Burri Y and Gijs M A M 2005 A ball valve micropump in glass fabricated by powder blasting Sensors Actuators B 110 1-7
198. Pan T, McDonald S J, Kai E M and Ziaie B 2005 A magnetically driven PDMS micropump with ball check-valves J. Micromech. Microeng. 15 1021-6
199. Hasselbrink E F, Shepodd T J and Rehm J E 2002 High-pressure microfluidic control in lab-on-a-chip devices using mobile polymer monoliths Anal. Chem. 74 4913-8
200. Reichmuth D S, Shepodd T J and Kirby B J 2004 On-chip high-pressure picoliter injector for pressure-driven flow through porous media Anal. Chem. 76 5063-8
201. Seidemann V, Bütefisch A and Büttgenbach S 2002 Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers Sensors Actuators A 97-98 457-61
202. Stemme E and Stemme G 1993 A valveless diffuser/nozzle-based fluid pump Sensors Actuators A 39 159-67
203. Olsson A, Stemme G and Stemme E 2000 Numerical and experimental studies of flat-walled diffuser elements for valve-less micropump Sensors Actuators A 84 165-75
204. Gerlach T and Wurmus H 1995 Working principle and performance of the dynamic micropump Sensors Actuators A 50 135-40
205. Gerlach T 1998 Microdiffusers as dynamic passive valves for micropump applications Sensors Actuators A 69 181-91
206. Koch M, Evans A G R and Brunnschweiler A 1998 The dynamic micropump driven with a screen printed PZT actuator J. Micromech. Microeng. 8 119-22
207. Schabmueller C G J, Koch M, Mokhtari M E, Evans A G R, Brunnschweiler A and Sehr H 2002 Self-aligning gas/liquid micropump J. Micromech. Microeng. 12 420-4
208. Olsson A, Enoksson P, Stemme G and Stemme E 1997 Micromachined flat-walled valveless diffuser pumps J. Microelectromech. Syst. 6 161-6
209. Ullmann A and Fono I 2002 The piezoelectric valve-less pump-improved dynamic model J. Microelectromech. Syst. 11 655-64
210. Tsai J-H and Lin L 2002 A thermal-bubble-actuated micronozzle-diffuser pump J. Microelectromech. Syst. 11 665-71
211. Andersson H, van der Wijngaart W, Nilsson P, Enoksson P and Stemme G 2001 A valve-less diffuser micropump for microfluidic analytical systems Sensors Actuators B 72 259-65
212. Jang W I, Choi C A, Jun C-H, Kima Y T and Esashi M 2004 Surface micromachined thermally driven micropump Sensors Actuators A 115 151-8
213. Morris C J and Forster F K 2003 Low-order modeling of resonance for fixed-valve micropumps based on first principles pump J. Microelectromech. Syst. 12 325-34
214. Feldt C and Chew L 2002 Geometry-based macro-tool evaluation of non-moving-part valvular microchannels J. Micromech. Microeng. 12 662-9
215. Ahn C H, Choi J-W, Beaucage G, Nevin J H, Lee J-B, Puntambekar A and Lee J Y 2004 Disposable smart lab on a chip for point-of-care clinical diagnostics Proc. IEEE 92 154-73
216. Yamada M and Seki M 2004 Nanoliter-sized liquid dispenser array for multiple biochemical analysis in microfluidic devices Anal. Chem. 76 895-9
217. Man P F, Mastrangelo C H, Burns M A and Burke D T 1998 Microfabricated capillary-driven stop valve and sample injector MEMS'98 pp 45-50
218. Yokoyama Y, Takeda M, Umemoto T and Ogushi T 2004 Thermal micro pumps for a loop-type micro channel Sensors Actuators A 111 123-8
219. Melin J, Roxhed N, Gimenez G, Griss P, van der Wijngaart W and Stemme G 2004 A liquid-triggered liquid microvalve for on-chip flow control Sensors Actuators B 100 463-8
220. Duffy D C, Gillis H L, Lin J, Sheppard N F and Kellogg G J 1999 Microfabricated centrifugal microfluidic systems: characterization and multiple enzymatic assays Anal. Chem. 71 4669-78
221. Johnson R D, Badr I H A, Barrett G, Lai S, Lu Y, Madou M J and Bachas L G 2001 Development of a fully integrated analysis system for ions based on ion-selective optodes and centrifugal microfluidics Anal. Chem. 73 3940-6
222. Puckett L G, Dikici E, Lai S, Madou M, Bachas L G and Daunert S 2004 Investigation into the applicability of the centrifugal microfluidics platform for the development of protein-ligand binding assays incorporating enhanced green fluorescent protein as a fluorescent reporter Anal. Chem. 76 7263-8
223. Leu T-S and Chang P-Y 2004 Pressure barrier of capillary stop valves in micro sample separators Sensors Actuators A 115 508-15
224. Andersson H, van der Wijngaart W, Griss P, Niklaus F and Stemme G 2001 Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels Sensors Actuators B 75 136-41
225. Andersson H, van der Wijngaart W and Stemme G 2001 Micromachined filter-chamber array with passive valves for biochemical assays on beads Electrophoresis 22 249-57
226. Mohebi M M and Evans J R G 2002 A drop-on-demand ink-jet printer for combinatorial libraries and functionally graded ceramics J. Comb. Chem. 4 267-74
227. Dziuban J A et al 2004 Portable gas chromatograph with integrated components Sensors Actuators A 115 318-30
228. Fütterer C, Minc N, Bormuth V, Codarbox J-H, Laval P, Rossier J and Viovy J-L 2004 Injection and flow control system for microchannels Lab. Chip 4 351-6
229. Taniguchi T, Torii T and Higuchi T 2002 Chemical reactions in microdroplets by electrostatic manipulation of droplets in liquid media Lab. Chip 2 19-23
230. Lee J, Moon H, Fowler J, Schoellhammer T and Kim C-J 2002 Electrowetting and electrowetting-on-dielectric for microscale liquid handling Sensors Actuators A 95 259-68
231. Pollack M G, Shenderov A D and Fair R B 2002 Electrowetting-based actuation of droplets for integrated microfluidics Lab. Chip 2 96-101
232. Paik P, Pamula V K, Pollack M G and Fair R B 2003 Electrowetting-based droplet mixers for microfluidic systems Lab. Chip 3 28-33
233. Gascoyne P R C, Vykoukal J V, Schwartz J A, Anderson T J, Vykoukal D M, Current K W, McConaghy C, Becker F F and Andrews C 2004 Dielectrophoresis-based programmable fluidic processors Lab. Chip 4 299-309
234. Srinivasan V, Pamula V K and Fair R B 2004 An integrated digital microfluidic lab-on-a-chip for clinical diagnostics on human physiological fluids Lab. Chip 4 310-5
235. Yi U-C and Kim C-J 2004 Soft printing of droplets pre-metered by electrowetting Sensors Actuators A 114 347-54
236. Richter A, Plettner A, Hofmann K A and Sandmaier H 1991 A micromachined electrohydrodynamic (EHD) pump Sensors Actuators A 29 159-68
237. Fuhr G, Schnelle T and Wagner B 1994 Traveling wave-driven microfabricated electrohydrodynamic pumps for liquids J. Micromech. Microeng. 4 217-26
238. Manz A, Harrison D J, Verpoorte E M J, Fettinger J C, Paulus A, Lüdi H and Widmer H M 1992 Planar chips technology for miniaturization and integration of separation techniques into monitoring systems: capillary electrophoresis on a chip J. Chromatogr. A 593 253-8
239. Jacobson S C, Hergenroder R, Koutny L B and Ramsey J M 1994 Open-channel electrochromatography on a microchip Anal. Chem. 66 2369-73
240. Ramsey R S and Ramsey J M 1997 Generating electrospray from microchip devices using electroosmotic pumping Anal. Chem. 69 1174-8
241. Thomas C D, Jacobson S C and Ramsey J M 2004 Strategy for repetitive pinched injections on a microfluidic device Anal. Chem. 76 6053-7
242. Linder V, Sia S K and Whitesides G M 2005 Reagent-loaded cartridges for valveless and automated fluid delivery in microfluidic devices Anal. Chem. 77 64-71
243. Jensen K F, Han J, Harrison D J and Voldman J 2005 Proc. νTAS 2005 Conf., 9th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (9-13 October 2005, Boston, MA, USA)