A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing

Journal of Microelectromechanical Systems

Volumn 12, Issue 2, 2003, Pages 201-208

  Rich, Collin A ^a   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Corrugated surfaces; Diaphragms; Fluid flow control; Microvalves; Parylene; Thermal modeling; Thermopneumatic actuation; Valves

Indexed keywords

ACTUATORS; DIAPHRAGMS; FLOW CONTROL; GLASS; HEATING; SENSORS; SILICON; VAPOR PRESSURE;

THERMOPNEUMATIC MICROVALVES;

VALVES (MECHANICAL);

EID: 0037390890     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.808459     Document Type: Article

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