Fabrication and testing of a pair of passive bivalvular microvalves composed of p + silicon diaphragms

Sensors and Actuators, A: Physical

Volumn 57, Issue 1, 1996, Pages 75-78

  Yang, Eui Hyeok ^a   Han, Sang Woo ^a   Yang, Sang Sik ^a  

^a Ajou University   (South Korea)

Author keywords

Etch stop method; p + silicon film; Passive bivalvular microvalves; Static flow testing

Indexed keywords

DIFFUSION; EQUIPMENT TESTING; ETCHING; FABRICATION; FLOW CONTROL; FLOW MEASUREMENT; FLOW OF WATER; MICROELECTROMECHANICAL DEVICES; PRESSURE EFFECTS; SEMICONDUCTING BORON; SEMICONDUCTING FILMS; SILICON WAFERS;

ETCH STOP METHOD; PASSIVE BIVALVULAR MICROVALVES; PRESSURE DIFFERENCE; SILICON DIAPHRAGMS; SILICON FILMS; STATIC FLOW TESTING;

VALVES (MECHANICAL);

EID: 0030264714     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80097-0     Document Type: Article

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