Design, fabrication, and testing of a bistable electromagnetically actuated microvalve

Journal of Microelectromechanical Systems

Volumn 9, Issue 2, 2000, Pages 181-189

  Capanu, Mircea ^a   Boyd IV, James G ^a   Hesketh, Peter J ^a,b  

^a University of Illinois Chicago   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELASTICITY; FABRICATION; FLOW CONTROL; METAL FOIL; NICKEL ALLOYS; PHOTOLITHOGRAPHY; SILICON; VALVES (MECHANICAL);

ELECTROPLATED GOLD COIL; MAGNETIC FOIL; MICROVALVE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033720688     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.846698     Document Type: Article

References (20)

1. B. Hälg, "On a micro-electro-mechanical nonvolatile memory cell." IEEE Trans. Electron Devices, vol. 37, pp. 2230-2236, Oct. 1990.
2. T. Lisec, M. Kreutzer, and B. Wagner, "A bistable pneumatic microswitch for driving fluidic components," Sens. Actuators, vol. A54. pp. 746-749, 1996.
3. J. Vollmer, H. Hein, W. Menz, and F. Walter, "Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators." Sens. Actuators, vol. A43, pp. 330-334, 1994.
4. H. Ren and E. Gerhard, "Design and fabrication of a current-pulse-excited bistable magnetic microactuator." Sens. Actuators, vol. A 58, pp. 259-264, 1997.
5. B. Wagner, H. J. Quenzer, S. Hoerschelmann, T. Lisec, and M. Juerss, "Bistable microvalve with pneumatically coupled membranes," in 9th Annual IEEE Int. MEMS Workshop, San Diego, CA, 1996, pp. 384-388.
6. W. K. Schomburg and C. Goll, "Design optimization of bistable microdiaphragm valves." Sens. Actuators, vol. A 64, pp. 259-264, 1998.
7. D. Bosh, B. Heimhofer, G. Mück, H. Seidel, U. Thumser, and W. Welser, "A silicon microvalve with combined electromagnetic/electrostatic actuation." Sens. Actuators, vol. A 37-38, pp. 684-692, 1993.
8. C. H. Ahn, "Micromachined components as integrated inductors and magnetic microactuators," Ph.D. dissertation, Dept. Elect. Eng., Georgia Inst. Technol., Atlanta, GA, May 1993.
9. W. Zhang and C. H. Ahn, "A bi-directional magnetic micropump on a silicon wafer," in Proc. Solid-State Sens. Actuators Workshop, Hilton Head Island, SC, June 2-6, 1996, pp. 94-97.
10. F. M. White, Fluid Mechanics. New York: McGraw-Hill, 1979.
11. I. E. Idelchik, Handbook of Hydraulic Resistance, Boca Raton, FL: CRC Press, 1994.
12. H. E. Merrit, Hydraulic Control Systems. New York: Wiley, 1967.
13. T. Gerlach, "Microdiffusers as dynamic passive valves for micropump applications." Sens. Actuators, vol. A 69, pp. 181-191, 1998.
14. B. Wagner and W. Benecke, "Microfabricated actuator with moving permanent magnet," in Proc. IEEE MEMS Conf., Nara, Japan, 1991, pp. 127-32.
15. T. M. Liakopoulos, W. Zhang, and C. H. Ahn, "Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications." in Proc. IEEE MEMS Conf., San Diego, CA, 1996, pp. 79-84.
16. L. K. Lagorce, O. Brand, and M. G. Allen, "Magnetic microactuators based on polymer magnets," J. Microelectromech. Syst., vol. 8, pp. 2-9, Mar. 1999.
17. P. Campbell, Permanent Magnet Materials and Their Applications. Cambodge, U.K.: Cambridge Univ. Press, 1994.
18. A.D. Khazan, Transducers and Their Elements. Englewood Cliffs, NJ: Prentice-Hall, 1994.
19. J. D. Jackson, Classical Electrodynamics. New York: Wiley, 1975.
20. A. H. Burr, Mechanical Analysis Design. Amsterdam, The Netherlands: Elsevier, 1982.