Comparison of two passive microvalve designs for microlamination architectures

Journal of Micromechanics and Microengineering

Volumn 10, Issue 1, 2000, Pages 15-20

  Paul, Brian K ^a   Terhaar, Tyson ^a  

^a OREGON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ORIFICES; PRESSURE DROP; VALVES (MECHANICAL);

MICROFLAPPERS; MICROLAMINATION PROCESS; MICROVALVES;

MICROMACHINING;

EID: 0033893266     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/1/303     Document Type: Article

References (25)

1. Esposito A 1988 Fluid Power with Applications (Englewood Cliffs, NJ: Prentice-Hall) pp 380-1
2. Young M 1997 Platelet-Cooled Plasma Arc Torch, DOE Contract No DE-AR21-93MC30361, Technology Development Data Sheet (Morgantown, WV: Federal Energy Technology Center) pp 5-6
3. Haas R W, Brest D, Mueggenburg H, Lang L and Heimlich D 1993 Int. J. Infrared Millimeter Waves 14 2289-93
4. Haas R W 1995 Astron. Soc. Pac. Conf. Ser. 75 99-105
5. Kennedy Space Center 1988 National Space Transportation System (NSTS) Shuttle Reference Manual (NASA)
6. Goldberg N 1984 IEEE Transactions on Components, Hybrids, and Manufacturing Technology 7 154-9
7. Krause V, Treusch H-G, Loosen P, Kimpel T, Biesenbach J, Kosters A, Robert F, Oestreicher H, Marchiano M and DeOdorico B 1995 Proc. SPIE 2148 351-8
8. Kleiner M B, Kuhn S A and Haberger K 1995 IEEE Trans. Components, Packaging, Manufacturing A 18 795-804
9. Martin P M, Bennett W D and Johnson J W 1996 Proc. SPIE 2639 82-8
10. Matson D W, Martin P M, Bennett W D, Stewart D C and Johnson J W 1997 Proc. SPIE 3223 253-9
11. Jovanovic G, Zaworski J, Plant T and Paul B 1999 Proc. 3rd Int. Conf. on Microreaction Technology (Frankfurt, Germany) at press
12. Matson D W, Martin P M, Tonkovich A Y and Roberts G L 1998 Proc. SPIE 3514 386-92
13. Tonkovich A Y, Zilka J L, Wang Y, LaMont M J, Fitzgerald S, Vanderwiel D P and Wegeng R S 1999 Proc. 3rd Int. Conf. on Microreaction Technology (Frankfurt, Germany) at press
14. Martin P M, Matson D W, Bennett W D and Hammerstrom D J 1998 Proc. SPIE 3515 172-6
15. Tiren J, Tenerz L and Hok B 1989 Sensors Actuators 18 389-96
16. Smith L and Hok B 1991 Proc. Int. Conf Solid-State Sensors and Actuators (San Francisco, June 24-27) (Piscataway, NJ: IEEE) pp 1049-51
17. Stoev I, Syrzycki M, Parameswaran M, Chapman G and Rawicz A 1992 Canadian J. Phys. 70 881-5
18. Yang E H, Han S W and Yang S S 1996 Sensors Actuators A 57 75-8
19. In-Byeong K, Haskard M R, Samaan N and Orders P 1996 Proc. SPIE 3321 280-6
20. Peterson R B 1998 Microscale Thermophys. Eng. 2 121-31
21. Peterson R B 1999 Microscale Thermophys. Eng. 3 17-30
22. Schomburg W and Scherrer B 1992 J. Micromech. Microeng. 2 184-6
23. Rapp R, Schomburg W K, Maas D, Schulz J and Stark W 1994 Sensors Actuators A 40 57-61
24. Ilzhofer A, Ritter B and Tsakmakis C 1995 J. Micromech. Microeng. 5 226-30
25. Figliola R and Beasley D 1995 Theory and Design for Mechanical Measurements (New York: Wiley) pp 446-51