Design and fabrication of a current-pulse-excited bistable magnetic microactuator

Sensors and Actuators, A: Physical

Volumn 58, Issue 3, 1997, Pages 259-264

  Ren, H ^a   Gerhard, E ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Bistable magnetic microactuators; Current pulse exciting; Electroplating; Micromachining technology; UV lithography for resist micromoulding

Indexed keywords

DESIGN; FABRICATION; MAGNETIC FIELD EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOLITHOGRAPHY;

MAGNETIC MICROACTUATORS;

ACTUATORS;

EID: 0031081872     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01395-2     Document Type: Article

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