A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems

Journal of Microelectromechanical Systems

Volumn 12, Issue 1, 2003, Pages 81-92

  Roberts, David C ^a   Li, Hanqing ^b   Steyn, Lodewyk ^b   Yaglioglu, Onnik ^b   Spearing, S Mark ^b   Schmidt, Martin A ^b   Hagood, Nesbitt W ^a  

^a Photonic Systems Inc   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Hydraulic amplification; MEMS; Micropump; Microvalve; Piezoelectric

Indexed keywords

AMPLIFICATION; BONDING; CHARACTERIZATION; FREQUENCIES; HYDRAULICS; MICROMACHINING; PIEZOELECTRIC MATERIALS; PISTONS; PRESSURE; REACTIVE ION ETCHING; SILICON WAFERS; VALVES (MECHANICAL);

DEEP REACTIVE ION ETCHING; HYDRAULIC AMPLIFICATION; HYDRAULIC MICROPUMPING SYSTEMS; MICROPUMP; PIEZOELECTRIC MICROVALVE;

MICROELECTROMECHANICAL DEVICES;

EID: 0037301524     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.807471     Document Type: Article

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