Simulation and fabrication of micromachined cantilever valves

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 756-759

  Koch, Michael ^a   Evans, Alan G R ^a   Brunnschweiler, Arthur ^a,b  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b English Electric Valve Company   (United Kingdom)

Author keywords

Cantilever valves; Micromachining; Simulations

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; ITERATIVE METHODS; MICROMACHINING; STICTION;

MICROMACHINED CANTILEVER VALVES; SOFTWARE PACKAGE ANSYS; SOFTWARE PACKAGE FLOW3D;

VALVES (MECHANICAL);

EID: 0031176323     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01577-X     Document Type: Article

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