MEMS micro-valve for space applications

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 188-193

  Chakraborty, I ^a   Tang, W C ^a   Bame, D P ^a   Tang, T K ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; PIEZOELECTRIC DEVICES; SPACE APPLICATIONS; THERMAL EFFECTS; VALVES (MECHANICAL);

MICROVALVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033741710     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00382-9     Document Type: Article

References (5)

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2. Mueller J.et al. Thruster Options for Microspacecraft: A Review and Evaluation of Existing Hardware and Emerging Technologies. 33rd AIAA/ASME/SAE/ASEE Joint Propulsion Conf., Seattle, WA, July 6-9:1997;. AIAA 97-3058.
3. Tang W.C.et al. MEMS Micro Valve for Spacecraft Propulsion and Organic Material Sensors. GOMAC '98 Micro-Systems and Their Applications Conference, March 18:1998.
4. Barth P. Silicon Microvalves for Gas Flow Control. The 8th International Conference on Solid State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, June 25-29:1999;76-279.
5. Dunbar M., Jerman H. Understanding microvalve technology. Sensors. 1994;26-36. September.