Microfluidic integrated circuits for signal processing using analogous relationship between pneumatic microvalve and MOSFET

Journal of Microelectromechanical Systems

Volumn 12, Issue 4, 2003, Pages 497-505

  Takao, Hidekuni ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Fluidics; Integrated circuit; Microvalve; MOSFET; Signal processing

Indexed keywords

FLUIDICS; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MOSFET DEVICES; SIGNAL PROCESSING; VALVES (MECHANICAL);

MICROFLUIDIC INTEGRATED CIRCUITS; PNEUMATIC MICROVALVE;

MICROELECTROMECHANICAL DEVICES;

EID: 0042388209     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.815838     Document Type: Article

References (12)

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