A bistable pneumatic microswitch for driving fluidic components

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 746-749

  Lisec, T ^a   Kreutzer, M ^a   Wagner, B ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

Fluidic components; Microswitches; Pneumatic switches

Indexed keywords

EID: 0343087772     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80050-7     Document Type: Article

References (5)

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2. S. Shoji and M. Esashi, Bonding and assembling methods for realising a μTAS, Proc. μTAS '94, Kluwer, Dordrecht, 1995, pp. 165-179.
3. B.H. van der Schoot, S. Jeanneret, A. van den Berg and N.F. de Rooij, A silicon integrated miniature chemical analysis system, Sensors and Actuators B, 6 (1992) 57-60.
4. T.S.J. Lammerink et al., Micromachined hydraulic astable multivibrator, Proc. IEEE MEMS '95, Amsterdam, The Netherlands, 1995, pp. 13-18.
5. T. Lisec et al., Thermally driven microvalve with buckling behaviour for pneumatic applications, Proc. IEEE MEMS'94, Oiso, Japan, 1994, pp. 13-17.