A high density microchannel network with integrated valves and photodiodes

Sensors and Actuators, A: Physical

Volumn 95, Issue 2-3, 2002, Pages 77-83

  Baechi, Daniel ^a   Buser, Rudolf ^b   Dual, Jurg ^a  

^a Institute of Mechanical Systems (IMES)   (Switzerland)

^b Landscape Architecture   (Switzerland)

Author keywords

MEMS microvalve array; Microchannels; Optical particle detection; Silicone rubber membranes

Indexed keywords

BACTERIA; CELLS; CHANNEL FLOW; MEMBRANES; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; PARALLEL PROCESSING SYSTEMS; PARTICLES (PARTICULATE MATTER); PHOTODIODES; RUBBER;

BIOLOGICAL CELL; HIGH DENSITY MICROCHANNEL NETWORK; MICROVALVE ARRAYS; SILICONE RUBBER MEMBRANE; SILICONE VALVE MEMBRANE; THERMOPNEUMATIC ACTUATION;

PARTICLE DETECTORS;

EID: 0036140507     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00717-8     Document Type: Article

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