An electrochemical microactuator: Principle and first results

Journal of Microelectromechanical Systems

Volumn 5, Issue 1, 1996, Pages 2-9

  Neagu, Cristina R ^a,c,d,e   Gardeniers, Johannes G E ^a,f,g   Elwenspoek, Miko ^a,f,g,h,i   Kelly, John J ^b,j,k,l,m  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

^c UNIVERSITY OF BUCHAREST   (Romania)

^d INSTITUTE OF ATOMIC PHYSICS   (Romania)

^e Transducers and Mat Science Group

^f RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

^g UNIVERSITY OF TWENTE   (Netherlands)

^h FREIE UNIVERSITÄT BERLIN   (Germany)

ⁱ University College Dublin ^*

^j UNIVERSITY COLLEGE DUBLIN   (Ireland)

^k PHILIPS RESEARCH LABORATORIES   (Germany)

^l PHILIPS RESEARCH LABORATORIES   (Netherlands)

^m UTRECHT UNIVERSITY   (Netherlands)

more..

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRODES; ELECTROLYSIS; ELECTROLYTES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLATINUM; SEMICONDUCTING SILICON;

ELECTROCHEMICAL MICROACTUATORS; MICROLIQUID HANDLING SYSTEM; SILICON MICROMACHINING TECHNIQUES;

ACTUATORS;

EID: 0030110089     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.485209     Document Type: Article

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