Shape memory microvalves based on thin films or rolled sheets

Materials Science and Engineering: A

Volumn 273-275, Issue , 1999, Pages 784-788

  Kohl, M ^a   Dittmann, D ^a   Quandt, E ^a   Winzek, B ^a   Miyazaki, S ^b   Allen, D M ^c  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF TSUKUBA   (Japan)

^c CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Microvalves; Rolled sheets; Shape memory alloys; Thin films; Ti Ni based alloys

Indexed keywords

COLD ROLLING; FORGING; MICROACTUATORS; PRESSURE EFFECTS; SPUTTER DEPOSITION; TENSILE STRENGTH; THERMAL EFFECTS; THIN FILMS; TITANIUM ALLOYS; VALVES (MECHANICAL);

ELECTROLYTIC PHOTOETCHING; GAS MICROVALVES;

SHAPE MEMORY EFFECT;

EID: 0000407351     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5093(99)00416-5     Document Type: Article

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