Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 457-461

  Seidemann, Volker ^a   Bütefisch, Sebastian ^a   Büttgenbach, Stephanus ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Assembly; Compliant structures; Micro gripper; SU8; Valve

Indexed keywords

ACTUATORS; ASPECT RATIO; COMPONENTS; ELASTIC MODULI; EPOXY RESINS; FABRICATION; FLUIDIC DEVICES; MECHANICAL VARIABLES MEASUREMENT; SENSORS; SHAPE MEMORY EFFECT; SPIN COATING; THERMAL EXPANSION;

CHECK VALVE; FLEXURAL HINGES; MICROCOMPLIANT BEAMS; MICROFLUIDIC CHANNEL; MICROGRIPPERS; MICROMECHANICAL COMPONENTS; MICROVALVES; PHOTOEPOXY; TACTILE FORCE SENSOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0036544018     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00829-9     Document Type: Conference Paper

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