Design optimization of bistable microdiaphragm valves

Sensors and Actuators, A: Physical

Volumn 64, Issue 3, 1998, Pages 259-264

  Schomburg, W K ^a   Goll, C ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Bistable diaphragms; Design optimization; Microvalves

Indexed keywords

ACTUATORS; APPROXIMATION THEORY; BENDING (DEFORMATION); DIAPHRAGMS; ELASTIC MODULI; OPTIMIZATION; PRESSURE EFFECTS;

BISTABLE MICRODIAPHRAGM VALVES;

VALVES (MECHANICAL);

EID: 0031702530     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01612-9     Document Type: Article

References (8)

1. 2 beam as the movable part, Proc. Actuator '94, Bremen, Germany, 15-17 June, 1994, pp. 34-37.
2. D.S. Popescu, D.C. Dascalu, M. Elwenspoek and T. Lammerink, Silicon active microvalves using buckled membranes for actuation, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995, pp. 305-308.
3. B. Wagner, H.J. Quenzer, S. Hoerschelmann, T. Lisec and M. Juerss, Bistable microvalves for implantable drug delivery systems, Proc. 5th Int. Conf. New Actuators, Actuator '96, Bremen, Germany, 26-28 June, 1996, pp. 33-36.
4. C. Goll, W. Bacher, B. Büstgens, D. Maas, W. Menz and W.K. Schomburg, Microvalves with bistable buckled polymer diaphragms, J. Micromech. Microeng., 6 (1996) 77-79.
5. J.W. Beams, Mechanical properties of thin films of gold and silver, in C.A. Neugebauer, J.B. Newkirk and D.A. Vermilyea (eds.), Proc. Structure and Properties of Thin Films, John Wiley, New York, 1959, pp. 183-192.
6. J.Y. Pan, P. Lin, F. Masceh and S.D. Senturia, Verification of FEM analysis of load deflection methods for measuring mechanical properties of thin films, Proc. Hilton Head Island, SC, USA, 4-7 June, 1990, pp. 70-73.
7. W.K. Schomburg et al., Fabrication of microfluidic devices by thermoplastic molding and diaphragm transfer, Proc. Int. Mechanical Engineering Congress Exposition, San Francisco, CA, USA, ASME Dynamic Systems and Control Division DSC 57-2, 1995, pp. 951-956.
8. S. Timoschenko and S. Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill, New York, 2nd edn., 1959.