Plastic micropump with ferrofluidic actuation

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 96-102

  Yamahata, Christophe ^a   Chastellain, Mathieu ^a   Parashar, Virendra K ^a   Petri, Alke ^a   Hofmann, Heinrich ^a   Gijs, Martin A M ^a  

^a EPFL   (Switzerland)

Author keywords

Ferrofluid; Lab on a chip; Micropump; Polymethylmethacrylate (PMMA); Powder blasting; Silicone check valve

Indexed keywords

BLASTING; FLUIDIC DEVICES; MAGNETIZATION; MICROMACHINING; MICROSTRUCTURE; MONOMERS; PERMANENT MAGNETS; POLYMETHYL METHACRYLATES; SILICONES; WATER;

FERROFLUID; LAB-ON-A-CHIP; MICROPUMP; POWDER BLASTING; SILICONE CHECK VALVE;

MICROELECTROMECHANICAL DEVICES;

EID: 14044251463     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839007     Document Type: Article

References (31)

1. A. Manz, N. Graber, and H. M. Widmer, "Miniaturized total chemical analysis systems: a novel concept for chemical sensing," Sens. Actuators B, Chem., vol. 1, pp. 244-248, 1990.
2. A. Manz et al., "Micromachining of monocrystalline silicon and glass for chemical analysis systems - a look into next century's technology or just a fashionable craze?," Trends Anal Chem., vol. 10, pp. 144-149, 1991.
3. D. R. Reyes, D. Iossifidis, P.-A. Auroux, and A. Manz, "Micro total analysis systems. 1. Introduction, theory, and technology," Anal. Chem., vol. 74, pp. 2623-2636, 2002.
4. P.-A. Auroux, D. Iossifidis, D. R. Reyes, and A. Manz, "Micro total analysis systems. 2. Analytical standard operations and applications," Anal Chem., vol. 74, pp. 2637-2652, 2002.
5. H. T. G. van Lintel, F. C. M. van de Pol, and S. Bouwstra, "A piezoelectric micropump based on micromachining of silicon," Sens. Actuators, vol. 15, pp. 153-167, 1988.
6. F. C. M. van de Pol and H. T. G. van Lintel, "A thermopneumatic micropump based on micro-engineering techniques," Sens. Actuators A, Phys., vol. 21, pp. 198-202, 1990.
7. N.-T. Nguyen et al., "MEMS-micropumps: a review," J. Fluids Eng., vol. 124, pp. 384-392, 2002.
8. F. E. H. Tray, Microfluidics and BioMEMS Applications. Boston, MA: Kluwer Academic, 2002, ch. 1.
9. Debiotech. Chronojet Silicon Micropump. [Online]. Available: http://www.debiotech.com/
10. Redwood Microsystems. Fluistor Microvalve. [Online]. Available: http://www.redwoodmicro.com/
11. Olivetti I-Jet. Silicon Ink-Jet Technology. [Online]. Available: http://www.olivettii-jet.it/
12. A. Olsson et al., "Valve-less diffuser micropumps fabricated using thermoplastic replication," Sens. Actuators A, Phys., vol. 64, pp. 63-68, 1998.
13. S. Böhm, W. Olthuis, and P. Bergveld, "A plastic micropump constructed with conventional techniques and materials," Sens. Actuators A, Phys., vol. 77, pp. 223-228, 1999.
14. S. Santra, P. Holloway, and C. D. Batich, "Fabrication and testing of a magnetically actuated micropump," Sens. Actuators B, Chem., vol. 87, pp. 358-364, 2002.
15. T. Merkel, M. Graeber, and L. Pagel, "A new technology for fluidic microsystems based on PCB technology," Sens. Actuators A, Phys., vol. 77, pp. 98-105, 1999.
16. K. Raj, J. Bonvouloir, and R. Moskowitz, "Loudspeaker," U.S. patent 5 461 677, 1995.
17. Ferrotec. Vacuum feedthroughs. [Online] http://www.ferrotec.com/
18. B. Wagner, M. Kreutzer, and W. Benecke, "Permanent magnet micromotors on silicon substrates," J. Microelectromech. Syst., vol. 2, pp. 23-29, 1993.
19. J. E. Leland, "Ferrofluid piston pump for use with heat pipes or the like," U.S. patent 5 005 639, 1991.
20. N. Greivell and B. Hannaford, "The design of a ferrofluid magnetic pipette," IEEE Trans. Biomed. Eng., vol. 44, pp. 129-135, 1997.
21. R. Pérez-Castillejos et al., "The use of ferrofluids in micromechanics," Sens. Actuators A, Phys., vol. 84, pp. 176-180, 2000.
22. R. Pérez-Castillejos et al.,"Smart passive microfluidic systems based on ferrofluids for microTAS applications," in Proc. Transducers '01, Munich, Germany, 2001.
23. H. Hartshorne et al., "Development of microfabricated valves for μTAS," in Proc. μTAS '98, Banff, Canada, 1998, pp. 379-381.
24. A. Hatch et al., "A ferrofluid magnetic micropump," J. Microelectromech. Syst., vol. 10, pp. 215-221, 2001.
25. A. E. Kamholz et al., "Magnetically actuated fluid handling devices for microfluidic applications," US Patent 6 408 884, 2002.
26. M. Richter, R. Linnemann, and P. Woiais, "Robust design of gas and liquid micropumps," Sens. Actuators A, Phys., vol. 68, pp. 480-486, 1998.
27. World Precision Instruments. Laboratory Supplies. [Online]. Available: http://www.wpiinc.com/
28. G. A. van Ewijk, G. J. Vroege, and A. P. Philipse, "Convenient preparation methods for magnetic colloids," J. Magnet. Magnetic Mater., vol. 20, pp. 31-33, 1999.
29. R. E. Rosensweig, Ferrohydrodynamics, New York, pp. 144-148, 1985.
30. E. Belloy et al., "Powder blasting for three-dimensional microstructuring of glass," Sens. Actuators A, Phys., vol. 86, pp. 231-237, 2000.
31. D. Solignac et al., "Powder blasting for the realization of microchips for bio-analytic applications," Sens. Actuators A, Phys. vol. 92, pp. 388-393, 2001.