A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks

Journal of Microelectromechanical Systems

Volumn 11, Issue 5, 2002, Pages 421-426

  Takao, Hidekuni ^a   Ishida, Makoto ^a   Sawada, Kazuaki ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Flow control; Fluid power; Micro fluidic system; MOSFET; Pneumatic microvalve

Indexed keywords

FLOW CONTROL; MICROACTUATORS; MOSFET DEVICES; PRESSURE CONTROL; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; VALVES (MECHANICAL);

FLUID POWER; MICROFLUIDIC SYSTEM; MICROPNEUMATIC CIRCUITS; PNEUMATIC MICROVALVE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036773145     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.803414     Document Type: Article

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