Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding

Journal of Micromechanics and Microengineering

Volumn 13, Issue 4, 2003, Pages

  Fu, C ^a   Rummler, Z ^a   Schomburg, W ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; BONDING; MICROSTRUCTURE; MULTILAYERS; POLYMERS;

MICRO BALL VALVES;

VALVES (MECHANICAL);

EID: 0037765106     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/4/316     Document Type: Conference Paper

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