Portable gas chromatograph with integrated components

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 318-330

  Dziuban, Jan Andrzej ^a   Mŕoz, Jerzy ^b   Szczygielska, Małgorzata ^b   Małachowski, Marcin ^b   Górecka Drzazga, Anna ^a   Walczak, Rafał ^a   Bula W ^a   Zalewski, D ^a   Nieradko, L ^c   Lysko J ^d   Koszur, J ^d   Kowalski, P ^d  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Res/Devmt Ctr Elec Eng M/AM   (Poland)

^c FEMTO ST INSTITUTE   (France)

^d Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

Micromachined injector; Portable gas chromatograph; Silicon micromechanics; Thermal conductivity detector

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; MICROMACHINING; MICROPROCESSOR CHIPS; RADIATION DETECTORS; THERMAL CONDUCTIVITY;

MICROMACHINED INJECTORS; PORTABLE GAS CHROMATOGRAPHS; SILICON MICROMECHANICS; THERMAL CONDUCTIVITY DETECTORS;

GAS CHROMATOGRAPHY;

EID: 4544340588     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.04.028     Document Type: Conference Paper

References (16)

1. V.G. Berezkin (Ed.), Chromatographic Adsorption Analysis: Selected Works of M.S. Tswett, Ellis Horwood, New York, 1990, see: L.S. Ettre, Milestones in Chromatography, LC GC North America, 21, (5) 2003, pp. 458-468.
2. V.G. Berezkin (Ed.), Chromatographic Adsorption Analysis: Selected Works of M.S. Tswett, Ellis Horwood, New York, 1990, see: L.S. Ettre, Milestones in Chromatography, LC GC North America, 21, (5) 2003, pp. 458-468.
3. Terry S., Jerman J., Angell J. A gas chromatographic air analyser fabricated on silicon wafer. IEEE Trans. El. Dev. ED26 (2):1979;1878-1886.
4. Agilent home web site: http://www.chem.agilent.com.
5. U. Lehmann, O. Krusemark, J. Müller, A. Vogel, D. Binz, Micromachined gas chromatograph based on plasma polymerised stationary phase, in: A. van den Berg, W. Othuis, P. Bergveld (Eds.), Proceedings of the μTAS'2000 Enschede, The Netherlands, May 14-18, 2000, Kluwer Academic Publishers, pp. 167-170.
6. Schomburg W.K., Fahrenberg J., Maas D., Rapp R. Active valves and pumps for microfluidics. J. Micromech. Microeng. 3:1993;216-218.
7. Bosch D., Heimhofer B., Mück G., Seidel H., Thumser U., Welser W. A silicon microvalve with combined electromagnetic/electrostatic actuation. Sens. Actuators. A37-38:1993;684-692.
8. J. Fluitman, Micromechanical components for μTAS, in: A. van den Berg, P. Bergveld (Eds.), Proceedings of the μTAS'94 Workshop, November 21-22, 1994, Kluwer Academic Publishers, Bergveld, pp. 73-83.
9. 3T B.V. home web site: http://www.3t.nl.
10. SLS Micro Technology GmbH home web site: http//:www.sls-micro-technology. de.
11. SRA/Actaris: The meter of natural gas - technical data, web site: http://www.sra-instruments.com.
12. Home web site of The Office of Industrial Technology of The Department of Energy (USA), Micro-gas chromatography controller for petro-chemical application, Petroleum project fact sheet: http://www.oit.doe.gov.
13. B. Andres, Micromechanical systems for process analytics - ABB automation Products, Proc. of the 17th International Frum Process Analytical Chemistry IFPAAC 2003, January 21-24, 2003, Scotttsdde/Phoenix, Arizona, USA.
14. J. Dziuban, A. Górecka-Drzazga, L. Nieradko, K. Malecki, J. Mróz, Silicon components for gas chromatograph, in: Proceedings of the 14th European Conference on Solid-State Transducers, August 27-30, 2000, Copenhagen, Denmark, pp. 55-58.
15. ł. Nieradko, K. Malecki, Silicon components for integrated gas chromatograph, in: Proceedings of the Shaping the Future, International Forum for Graduates and Young Researched at EXPO 2000, University of Hannover, July 11-13, 2000, Hannover, Germany, pp. 124-131.
16. J.M. Miller, Chromatography: Concepts and Contrasts, Wiley, New York, 1987.