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Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 478-483

Microfluidic system for the integration and cyclic operation of gas sensors

(6) Meckes, A a Behrens, J a Kayser, O a Benecke, W a Becker, Th b Muller G b

a UNIVERSITY OF BREMEN (Germany)

b DAIMLER AG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRON TUBES; FLUIDICS; MICROMACHINING; MICROSTRUCTURE; SEMICONDUCTING SILICON; SURFACE MOUNT TECHNOLOGY; THIN FILMS;

ELECTROMAGNETIC ACTUATION; MICROFLUIDIC SYSTEM; MICROVALVE;

CHEMICAL SENSORS;

EID: 0343932630 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(99)00060-6 Document Type: Article

Times cited : (37)

References (9)

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2
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3
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4
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- Proc. Actuator '96 , pp. 124-127
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5
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- Silicon micromachining technology for heated gas sensor elements
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8
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- Enhancement of air monitoring by combined microsensors and -actuators, Concept and design considerations for a miniaturised gas analyser
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- A. Meckes, J. Behrens, M. Hausner, M. Gebhard, W. Benecke, Enhancement of air monitoring by combined microsensors and -actuators, Concept and design considerations for a miniaturised gas analyser, Proc. μTAS '96, Basel, Switzerland, pp. 126-128.
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9
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.