Characteristics and fabrication of NiTi/Si diaphragm micropump

Sensors and Actuators, A: Physical

Volumn 93, Issue 1, 2001, Pages 87-92

  Xu, Dong ^a   Wang, Li ^a   Ding, Guifu ^a   Zhou, Yong ^a   Yu, Aibing ^a   Cai, Bingchu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Composite diaphragm; Microfabrication; Micropump; Thin film; TiNi

Indexed keywords

DIAPHRAGMS; NICKEL COMPOUNDS; PUMPS; THIN FILMS; TITANIUM COMPOUNDS;

COMPOSITE DIAPHRAGM; EUTECTIC BONDING; MICROFABRICATION; MICROPUMP;

MICROELECTROMECHANICAL DEVICES;

EID: 0035948960     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00628-8     Document Type: Article

References (11)

1. A thermo-pneumatic micropump based on microengineering techniques
2. Fluid micropumps based on rotary magnetic actuators
3. A piezoelectric micropump based on micromachining of silicon
4. A silicon membrane micropump with integrated bimetal actuator
5. A bi-directional silicon micropump
6. A micromembrane pump with electrostatic actuation
7. Thin-film shape-memory alloy actuated micropumps
8. Micromachining of NiTi shape memory thin-film for fabrication of micropump
9. Analysis of bi-metal thermostats
10. Control of internal stress in SMA/Si bimorph microactuators
11. Mechanical analysis and simulation of SMA thin-film microactuator based on Si substrate