Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 379-385

  Ulrich, J ^a   Zengerle, R ^b,c  

^a SIEMENS AG   (Germany)

^b Hahn Schickard Inst Mikro und I   (Germany)

^c Fraunhofer Inst F   (Germany)

Author keywords

FEM; Fluid flow simulation; Micropumps; Microvalves; Simulation; System simulation

Indexed keywords

EID: 30244493475     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80162-2     Document Type: Article

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