Electronically controllable microvalves based on smart hydrogels: Magnitudes and potential applications

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 748-753

  Richter, Andreas ^a   Kuckling, Dirk ^a   Howitz, Steffen ^b   Gehring, Thomas ^b   Arndt, Karl Friedrich ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b GeSiM mbH   (Germany)

Author keywords

Flow control; Hydrogel actuator; Hydrogel application; Microvalve; Particle tolerance; Temperature induced phase transition

Indexed keywords

ELECTRON DEVICE MANUFACTURE; FLOW CONTROL; HYDROGELS; INTELLIGENT MATERIALS; MICROACTUATORS; STRUCTURE (COMPOSITION); TECHNOLOGY; VALVES (MECHANICAL);

ELECTRONICALLY CONTROLLABLE MICROVALVES; MICROTECHNOLOGY; PRESSURE INSENSITIVITY; SMART HYDROGELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242720768     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.817898     Document Type: Article

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