Semi-disposable microvalves for use with microfabricated devices or microchips

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 401-409

  Yuen, Po Ki ^a   Kricka, Larry J ^a   Wilding, Peter ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL; EVAPORATION; NUMERICAL CONTROL SYSTEMS;

MICROFABRICATED DEVICES; PLEXIGLASS MICROVALVE SYSTEMS; SEMI-DISPOSABLE MICROVALVES;

FLUIDIC DEVICES;

EID: 0034272872     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/315     Document Type: Article

References (35)

1. Bosch D, Heimhofer B, Mück G, Seidel H, Thumser U and Welser W 1993 A silicon microvalve with combined electromagnetic/electrostatic actuation Sensors Actuators A 37/38 684-92
2. Cheng J Fortina P, Surrey S, Kricka L J and Wilding P 1996a Microchip-based devices for molecular diagnosis of genetic diseases Molecular Diagnosis 1 183-200
3. Cheng J Shoffner M A, Hvichia G E, Kricka L J and Wilding P 1996b Chip PCR. II. Investigation of different PCR amplification systems in micro-fabricated silicon-glass chips Nucleic Acids Res. 24 380-5
4. Emmer Å, Jansson M and Roeraade J 1992 Fabrication and characterization of a silicon microvalve J. Micmcolumn Sep. 4 13-15
5. Esashi M 1990 Integrated microflow control systems Sensors Actuators A 21/23 161-7
6. Esashi M, Shoji S and Nakano A 1989 Normally closed microvalve and micropump fabricated on a silicon wafer Sensors Actuators 20 163-7
7. Fahrenberg J, Bier W, Maas D, Menz W, Ruprecht R and Schomburg W K 1995 A microvalve system fabricated by thermoplastic molding J. Micromech. Microeng. 5 169-71
8. Goll C, Bacher W, Büstgens B, Maas D, Menz W and Schomburg W K 1996 Microvalves with bistable buckled polymer diaphragms J. Micromech. Microeng. 6 77-9
9. Goll C, Bacher W, Büstgens B, Maas D, Ruprecht R and Schomburg W K 1997 An electrostatically actuated polymer microvalve equipped with a movable membrane electrode J. Micromech. Microeng. 7 224-6
10. Huff M A, Gilbert J R and Schmidt M A 1993 Flow characteristics of a pressure-balanced microvalve Tech. Dig. Transducers 93 98-101
11. Jerman H 1990 Electrically-activated, micromachined diaphragm valves Technical Digest IEEE Sensors and Actuators Workshop pp 65-9
12. Ohnstein T, Fukiura T, Ridley J and Bonne U 1990 Micromachined silicon microvalve Prof. IEEE-MEMS Workshop pp 95-8
13. Ohori T, Shoji S, Miura K and Yotsumoto A 1998, Partly disposable three-way microvalve for a medical micro total analysis system (μTAS) Sensors Actuators A 64 57-62
14. Sato, K and Shikida M 1994, An electrostatically actuated gas valve with an s-shaped film element J. Micromech. Microeng. 4 205-9
15. Schomburg, W. K and Scherrer 1992, 3.5 μm thin valves in titanium membranes J. Micromech. Microeng. 2 184-6
16. Shikida M and Sato K 1994 Characteristics of an electrostatically-driven gas valve under high-pressure conditions Proc. IEEE-MEMS Workshop pp 235-40
17. Shoffner M A, Cheng J, Hvichia G E, Kricka L J and Wilding P 1996 Chip PCR. I. Surface passivation of microfabricated silicon-glass chips for PCR Nucleic Acids Research 24 375-9
18. Shoji S and Esashi M 1994 Microflow devices and systems J. Micromech. Microeng. 4 157-71
19. _1988 Micromachining for chemical sensors Chemical Sensor Technology vol 1, ed T Seiyama (Tokyo: Kodansha) pp 179-93
20. Shoji S, Esashi M and Matsuo M 1988 Prototype miniature blood gas analyzer fabricated on a silicon wafer Sensors Actuators 14 101-7
21. Shoji S, van der Schoot B H, de Rooij N F and Esashi M 1991 Smallest dead volume microvalves for integrated chemical analyzing systems Tech. Dig. Transducers 91 1052-5
22. _1992 A study of a high-pressure micropump for integrated chemical analysing systems Sensors Actuators A 32 335-9
23. Sim D Y, Kurabayashi T and Esashi M 1996 A bakable microvalve with a Kovar-glass-silicon-glass structure J. Micromech. Microeng. 6 266-71
24. Smith L and Hok B 1991 A silicon self-aligned non-reverse valve Tech. Dig. Transducers 91 1049-51
25. Terry S C, Jerman J H and Angell J B 1979 A gas chromatographic air analyzer fabricated on a silicon wafer IEEE Trans. Electron Device 26 1880-6
26. Tirén J, Tenerz L and Hok B 1989 A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon Sensors Actuators 18 389-96
27. van der School B H, Verpoorte E M J, Jeannerel S, Manz A and de Rooij N F 1994, Microsyslems for analysis in flowing solutions Micro Total Analysis Systems, Proceedings of the μTAS '94 Workshop (November 21-22, 1994) ed A van den Berg and P Bergveld (Dordrecht: Kluwer) 181-90
28. Van Lintel H T V, van de Pol F C and Bouwstra A 1988 Piezoelectric micropump based on micromachining of silicon Sensors Actuators 15 153-67
29. Wilding P, Kricka L J and Zemel J N 1994a Fluid handling in mesoscale analytical devices US Patent Specification 5 304 487
30. Wilding P, Pfahler J, Bau H H, Zemel J N and Kricka L J 1994b Manipulation and flow of biological fluids in straight channels micromachined in silicon Clin. Chem. 40 43-7
31. Wilding P, Shoffner M A, Cheng J, Hvichia G E and Kricka L J 1995 Thermal cycling and surface passivation of micromachined devices for PCR Clin. Chem. 41 1367-8
32. Yanagisawa K, Kuwano H and Tago A 1993 An electromagnetically driven microvalve Tech. Dig. Transducers 93 102-5
33. Yang E H, Han S W and Yang S S 1996, Fabrication and testing of a pair of passive bivalvular microvalves composed of p+ silicon diaphragms Sensors Actuators A 57 75-8
34. Zdeblick M J, Anderson R, Jankowski J, Kline-Schoder B, Christel L, Miles R and Weber W 1994 Thermopneumatically actuated microvalves and integrated electro-fluidic circuits Technical Digest IEEE Solid-State Sensors and Actuator Workshop pp 251-5
35. Zdeblick M J and Angell J B 1987 A microminiature electric-to-fluidic valve Tech. Dig. Transducers 87 827-9