A TiNiPd thin film microvalve for high temperature applications

Materials Science and Engineering: A

Volumn 378, Issue 1-2 SPEC. ISS., 2004, Pages 205-209

  Liu, Y ^a   Kohl, M ^a   Okutsu, K ^b   Miyazaki, S ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Microvalve; Shape memory actuator; Smart materials; Sputter deposition; Ti(Ni, Pd) thin films

Indexed keywords

HIGH TEMPERATURE OPERATIONS; MAGNETRON SPUTTERING; MICROACTUATORS; MICROMACHINING; PHOTOCHEMICAL FORMING; THIN FILMS; VALVES (MECHANICAL);

INFRARED MICROSCOPY; PHOTOCHEMICAL MICROMACHINING;

TITANIUM ALLOYS;

MARTENSITE; SHAPE MEMORY ALLOY; TRANSFORMATION (METALLURGY);

EID: 3042703722     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2003.10.369     Document Type: Article

References (5)

1. S. Miyazaki, M. Kohl, Recent developments in TiNi-based shape memory alloys, in: Proceedings of the International Symposium on Smart Structures and Materials, SPIE, vol. 3324, San Diego, USA, 1998, pp. 2-12.
2. Kohl M.Dittmann D.Quandt E.Winzek B.Miyazaki S.Allen D.M. Mater. Sci. Eng. A273-275 1999 784-788
3. M. Kohl, I. Hürst, B. Krevet, Time response of shape memory microvalves, in: H. Borgmann (Ed.), Proceedings of the Actuator 2000, Bremen, Germany, 2000, pp. 212-215.
4. Quandt E.Halene C.Holleck H.Feit K.Kohl M.Schloßmacher P.Skokan A.Skrobanek K.D. Sens. Actuators A 53 1996 434-439
5. Kohl M.Dittmann D.Quandt E.Winzek B. Sens. Actuators A 83 2000 214-219