Integrable silicon microfluidic valve with pneumatic actuation

Sensors and Actuators, A: Physical

Volumn 118, Issue 1, 2005, Pages 144-151

  Luque, Antonio ^a   Quero, José M ^a   Hibert, Cyrille ^b   Flückiger, Philippe ^b   Gañán Calvo, Alfonso M ^a  

^a UNIVERSITY OF SEVILLE   (Spain)

^b EPFL   (Switzerland)

Author keywords

Flow control; Microfabrication; Microfluidic system; Microvalve; Pressure compensation; System integration

Indexed keywords

ACTUATORS; EQUIPMENT TESTING; FABRICATION; FLOW CONTROL; MOSFET DEVICES; PNEUMATIC CONTROL; PRODUCT DESIGN; SILICON;

MICROFABRIATION; MICROFLUIDIC SYSTEM; MICROVALVES; PNEUMATIC ACTUATION; PRESSURE COMPENSATION; SYSTEM INTEGRATION;

PRESSURE RELIEF VALVES;

EID: 9944245964     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(04)00542-4     Document Type: Article

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